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Germanium CMOS potential from material and process perspectives: Be more positive about germanium
CMOS miniaturization is now approaching the sub-10 nm level, and further downscaling is
expected. This size scaling will end sooner or later, however, because the typical size is …
expected. This size scaling will end sooner or later, however, because the typical size is …
A review of thermal processing in the subsecond range: semiconductors and beyond
L Rebohle, S Prucnal, W Skorupa - Semiconductor Science and …, 2016 - iopscience.iop.org
Thermal processing in the subsecond range comprises modern, non-equilibrium annealing
techniques which allow various material modifications at the surface without affecting the …
techniques which allow various material modifications at the surface without affecting the …
2D Cu9S5/PtS2/WSe2 Double Heterojunction Bipolar Transistor with High Current Gain
Bipolar junction transistor (BJT) as one important circuit element is now widely used in high‐
speed computation and communication for its capability of high‐power signal amplification …
speed computation and communication for its capability of high‐power signal amplification …
Do** of semiconductor devices by Laser Thermal Annealing
In today's highly competitive semiconductor industry, and due to the accelerating pace of
technology development, the integration of new and disruptive solutions to address process …
technology development, the integration of new and disruptive solutions to address process …
Optimizing efficiency of InGaP/GaAs dual-junction solar cells with double tunnel junction and bottom back surface field layers
Dual-junction solar cells have permitted to augment markedly efficiency of solar energy
harvesting. This is because they involve a combination of III-V semiconductor materials with …
harvesting. This is because they involve a combination of III-V semiconductor materials with …
Recrystallization and interdiffusion processes in laser-annealed strain-relaxed metastable Ge0. 89Sn0. 11
The prospect of GeSn semiconductors for silicon-integrated infrared optoelectronics brings
new challenges related to the metastability of this class of materials. As a matter of fact …
new challenges related to the metastability of this class of materials. As a matter of fact …
Defect evolution and dopant activation in laser annealed Si and Ge
Defect evolution and dopant activation are intimately related to the use of ion implantation
and annealing, traditionally used to dope semiconductors during device fabrication. Ultra …
and annealing, traditionally used to dope semiconductors during device fabrication. Ultra …
Low temperature deactivation of Ge heavily n-type doped by ion implantation and laser thermal annealing
Heavy do** of Ge is crucial for several advanced micro-and optoelectronic applications,
but, at the same time, it still remains extremely challenging. Ge heavily n-type doped at a …
but, at the same time, it still remains extremely challenging. Ge heavily n-type doped at a …
Excimer laser annealing suppresses the bubbles in the recrystallization of argon-implantation induced amorphous germanium
We have investigated the recrystallization behavior of the argon (Ar) bubble-rich amorphous
germanium (a-Ge) by utilizing the excimer laser annealing (ELA) in comparison with the …
germanium (a-Ge) by utilizing the excimer laser annealing (ELA) in comparison with the …
Millisecond non-melt laser annealing of phosphorus implanted germanium: Influence of nitrogen co-do**
In this work, we present the results obtained using a CO 2 laser source at 10.6 μm
wavelength for the study of the non-melt annealing of phosphorus doped germanium in the …
wavelength for the study of the non-melt annealing of phosphorus doped germanium in the …