Germanium CMOS potential from material and process perspectives: Be more positive about germanium

A Toriumi, T Nishimura - Japanese Journal of Applied Physics, 2017 - iopscience.iop.org
CMOS miniaturization is now approaching the sub-10 nm level, and further downscaling is
expected. This size scaling will end sooner or later, however, because the typical size is …

A review of thermal processing in the subsecond range: semiconductors and beyond

L Rebohle, S Prucnal, W Skorupa - Semiconductor Science and …, 2016 - iopscience.iop.org
Thermal processing in the subsecond range comprises modern, non-equilibrium annealing
techniques which allow various material modifications at the surface without affecting the …

2D Cu9S5/PtS2/WSe2 Double Heterojunction Bipolar Transistor with High Current Gain

S Yang, L Pi, L Li, K Liu, K Pei, W Han… - Advanced …, 2021 - Wiley Online Library
Bipolar junction transistor (BJT) as one important circuit element is now widely used in high‐
speed computation and communication for its capability of high‐power signal amplification …

Do** of semiconductor devices by Laser Thermal Annealing

K Huet, F Mazzamuto, T Tabata… - Materials Science in …, 2017 - Elsevier
In today's highly competitive semiconductor industry, and due to the accelerating pace of
technology development, the integration of new and disruptive solutions to address process …

Optimizing efficiency of InGaP/GaAs dual-junction solar cells with double tunnel junction and bottom back surface field layers

FZ Kharchich, A Khamlichi - Optik, 2023 - Elsevier
Dual-junction solar cells have permitted to augment markedly efficiency of solar energy
harvesting. This is because they involve a combination of III-V semiconductor materials with …

Recrystallization and interdiffusion processes in laser-annealed strain-relaxed metastable Ge0. 89Sn0. 11

S Abdi, S Assali, MRM Atalla, S Koelling… - Journal of Applied …, 2022 - pubs.aip.org
The prospect of GeSn semiconductors for silicon-integrated infrared optoelectronics brings
new challenges related to the metastability of this class of materials. As a matter of fact …

Defect evolution and dopant activation in laser annealed Si and Ge

F Cristiano, M Shayesteh, R Duffy, K Huet… - Materials Science in …, 2016 - Elsevier
Defect evolution and dopant activation are intimately related to the use of ion implantation
and annealing, traditionally used to dope semiconductors during device fabrication. Ultra …

Low temperature deactivation of Ge heavily n-type doped by ion implantation and laser thermal annealing

R Milazzo, G Impellizzeri, D Piccinotti… - Applied Physics …, 2017 - pubs.aip.org
Heavy do** of Ge is crucial for several advanced micro-and optoelectronic applications,
but, at the same time, it still remains extremely challenging. Ge heavily n-type doped at a …

Excimer laser annealing suppresses the bubbles in the recrystallization of argon-implantation induced amorphous germanium

SY Wen, L He, YH Zhu, JW Luo - Journal of Applied Physics, 2023 - pubs.aip.org
We have investigated the recrystallization behavior of the argon (Ar) bubble-rich amorphous
germanium (a-Ge) by utilizing the excimer laser annealing (ELA) in comparison with the …

Millisecond non-melt laser annealing of phosphorus implanted germanium: Influence of nitrogen co-do**

S Stathopoulos, L Tsetseris, N Pradhan… - Journal of Applied …, 2015 - pubs.aip.org
In this work, we present the results obtained using a CO 2 laser source at 10.6 μm
wavelength for the study of the non-melt annealing of phosphorus doped germanium in the …