Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

This review provides a comprehensive survey of noise research in MEMS. Some
background on noise and on MEMS is provided. We review noise production mechanisms …

The monitoring of acceleration is essential for a variety of applications ranging from inertial
navigation to consumer electronics,. Typical accelerometer operation involves the sensitive …

Augmented Reality (AR) is a technology that enriches the sensorial perception of a person
by adding virtual contents directly on the user's surrounding environment. The modern AR …

We are reporting a 3D printable composite paste having strong thixotropic rheology. The
composite has been designed and investigated with highly conductive silver nanowires. The …

In this paper, a fully-differential high-order switched-capacitor (SC) sigma-delta (ΣΔ)
interface in a standard 0.5 μm CMOS technology for a micromechanical capacitive …

Analog-to-digital converters based on sigma-delta modulators (ΣAM) are a popular choice
for high resolution conversion from the analog to the digital domain. With relatively small …

In this paper, we review the high-resolution, micromachined accelerometers by enunciating
the development of their mechanical components, the electronic circuitry and the …

A simple and miniaturized optical tactile sensor for integrating with robotic and manual
minimally invasive surgery graspers is proposed in this study. For better miniaturization, the …

In this paper, we describe the system architecture and prototype measurements of a MEMS
gyroscope system with a resolution of 0.025 ^∘/s/\rmHz. The architecture makes extensive …