The field of piezoresistive sensors has been undergoing a significant revolution in terms of
design methodology, material technology and micromachining process. However, the …

A kind of cutting force sensor based on semi-conductive strain gauge is proposed in this
paper in order to optimize the contradiction between sensitivity and natural frequency of …

Accelerometers are one of the widely explored microsensors with many transduction
mechanisms. One of the primary concerns with piezoresistive microaccelerometers is their …

The paper focuses on the design, simulation, fabrication and experiment of a low cross-axis
sensitivity piezoresistive accelerometer fabricated by masked-maskless wet etching in …

This study describes the design and implementation of a novel high-performance
piezoresistive accelerometer for the measurement of shock acceleration of up to 100 000 g …

It has been demonstrated that piezoresistive beams in a purely axial deformation state
significantly enhance the performance of piezoresistive accelerometer. Current solution to …

With the springing up of the MEMS industry, research on accelerometers is focused on
miniaturization, integration, high reliability, and high resolution, and shares extensive …

In this paper, a D 33-mode piezoelectric micro-accelerometer with Pb 1.1 (Zr 0.52 Ti 0.48) O
3 (PZT) thin film is designed, fabricated and tested. Both the polarization and deformation …

In this paper a miniature piezoelectric energy harvester (PEH) with clamped–clamped beam
and mass loading at the center is introduced which has more consistency against off-axis …

A silicon-on-insulator (SOI) piezoresistive three-axis acceleration sensor, consisting of four L-
shaped beams, two intermediate double beams, two masses, and twelve piezoresistors, was …