The search for a reliable MEMS switch

GM Rebeiz, CD Patel, SK Han, CH Ko… - IEEE microwave …, 2013 - ieeexplore.ieee.org
The RF community has long been searching for the ideal switch since the birth of
electronics, and it is defined as a device having virtually no insertion loss (Ron= 0 Ω) over a …

Compact high-power SPST and SP4T RF MEMS metal-contact switches

H Zareie, GM Rebeiz - IEEE transactions on microwave theory …, 2014 - ieeexplore.ieee.org
This paper presents the design and characterization of compact high-power RF
microelectromechanical system single-pole single-throw (SPST) and single-pole four-throw …

A highly reliable MEMS relay with two-step spring system and heat sink insulator for high-power switching applications

YH Yoon, YH Song, SD Ko, CH Han… - Journal of …, 2015 - ieeexplore.ieee.org
This paper reports a highly reliable electrostatic microelectromechanical systems (MEMS)
relay for high-power switching applications. The main proposal to elevate reliability is to …

Microwave characterization of a wafer-level packaging approach for RF MEMS devices using glass frit bonding

I Comart, K Topalli, S Demir, T Akin - IEEE Sensors Journal, 2014 - ieeexplore.ieee.org
This paper presents the microwave characterization of a wafer level packaging approach for
RF MEMS devices, using glass frit as the bonding material. Coplanar waveguide …

Development and modeling of a wafer-level BCB packaging method for capacitive RF MEMS switches

I Comart, C Cetintepe, E Sagiroglu… - Journal of …, 2019 - ieeexplore.ieee.org
This paper presents a novel wafer-level packaging method for shunt, capacitive RF MEMS
switches using BCB as the adhesive interlayer. Fabrication and electrical characteristics of …

Modeling and simulation of an active restoring mechanism for high reliability switches in RF-MEMS technology

T Kuenzig, G Schrag, J Iannacci - Microelectronics Reliability, 2012 - Elsevier
We present a comprehensive study on a high reliability RF-MEMS switch with an active
thermal recovery capability to counteract stiction. Applying finite element (FE) simulations we …

In situ monitoring of dynamic bounce phenomena in RF MEMS switches

A Fruehling, R Tung, A Raman… - … of Micromechanics and …, 2013 - iopscience.iop.org
This paper presents the first ultra-low-power complementary metal–oxide–semiconductor
(CMOS)-based measurement technique for monitoring the cold-switched dynamic behavior …

Planar architecture for microstrip interfaced packaging of coplanar-waveguide-based radio frequency microelectromechanical system switches

S Singh, MS Giridhar, CVN Rao… - Journal of Micro …, 2015 - spiedigitallibrary.org
This paper describes the architecture of microstrip (MS) interfaced packaging of a coplanar-
waveguide (CPW)-based radio frequency microelectromechanical systems (RF MEMS) …

A literature survey on RF MEMS packaging

RH Agrawal, P Shah - 2017 International Conference on …, 2017 - ieeexplore.ieee.org
This paper presents the survey of different packaging schemes of RF MEMS switches for
wireless application. To determine the reliability of RF MEMS switch that tends to fails due to …

Characterization and reliability studies towards piezoelectrically actuated RF-MEMS switches

J Wang - 2017 - research.utwente.nl
This PhD research aims to develop high density piezoelectric RF-MEMS switch arrays to be
integrated in an energy-efficient agile RF transceiver with reconfigurable antenna. According …