MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable
timing devices that can rival the electrical performance of well-established quartz-based …

We present a new temperature compensation system for microresonator-based frequency
references. It consists of a phase-locked loop (PLL) whose inputs are derived from two …

Utilizing silicon and silicon dioxide's opposing temperature coefficients of Young's modulus,
composite resonators with zero linear temperature coefficient of frequency are fabricated …

As a result of their IC compatibility, high acoustic velocity, and high thermal conductivity,
aluminum nitride (AlN) resonators have been studied extensively over the past two decades …

This paper reports on the demonstration of series tuning for lateral micromechanical
oscillators and its application for electronic temperature compensation of piezoelectric …

This paper reports on the design and demonstration of a miniaturized and integrated heater
that enables low power ovenization and temperature stability for piezoelectric MEMS …

This paper presents an oven controlled N++[1 0 0] length-extensional mode silicon
resonator, with a lookup-table based control algorithm. The temperature coefficient of …

This paper reports the effects of crystal orientations on the temperature coefficient of
frequency (TCf) of single crystal silicon square-plate micromechanical resonators vibrating …

(57) ABSTRACT A crystalline semiconductor resonator device comprises two matched
resonators which are aligned differently with respect to the crystal structure of the crystalline …

This paper reports on the demonstration of an effective use of an artificial neural network
(ANN) algorithm for the implementation of a digital temperature compensation method …