We report a new family of ultra high-Q silicon microelectromechanical systems (MEMS) tuning fork gyroscopes demonstrating angular rate and, for the first time, rate integrating …
We report a new family of ultra-high Q silicon MEMS tuning fork gyroscopes demonstrating angle rate and, for the first time, rate integrating (whole angle) operation. The novel …
Aluminum nitride (AlN) has been widely used in microeletromechanical resonators for its excellent electromechanical properties. Here, we demonstrate the use of AlN as an …
WM Mellette, JE Ford - Journal of Lightwave Technology, 2015 - opg.optica.org
Transparent optical circuit switching can improve the aggregate bandwidth, scalability, and cost of data center networks provided, it can meet the performance requirements on …
This paper reports on the application of apodization techniques to 900 MHz–1 GHz MEMS AlN Contour-Mode Resonators (CMRs [1],[2],[3],[4],[5],[6]) to efficiently suppress spurious …