From the bottom-up: toward area-selective atomic layer deposition with high selectivity

AJM Mackus, MJM Merkx, WMM Kessels - Chemistry of Materials, 2018 - ACS Publications
Bottom-up nanofabrication by area-selective atomic layer deposition (ALD) is currently
gaining momentum in semiconductor processing, because of the increasing need for …

Atomic layer deposition: an overview

SM George - Chemical reviews, 2010 - ACS Publications
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Single-atom catalysts designed and prepared by the atomic layer deposition technique

J Fonseca, J Lu - ACS Catalysis, 2021 - ACS Publications
The atomic layer deposition (ALD) technique allows the synthesis of materials at the atomic
scale to be controlled. ALD has been adapted to design and prepare single-atom catalysts …

Area-selective deposition: fundamentals, applications, and future outlook

GN Parsons, RD Clark - Chemistry of Materials, 2020 - ACS Publications
This review provides an overview of area-selective thin film deposition (ASD) with a primary
focus on vapor-phase thin film formation via chemical vapor deposition (CVD) and atomic …

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

V Miikkulainen, M Leskelä, M Ritala… - Journal of Applied …, 2013 - pubs.aip.org
Atomic layer deposition (ALD) is gaining attention as a thin film deposition method, uniquely
suitable for depositing uniform and conformal films on complex three-dimensional …

The use of atomic layer deposition in advanced nanopatterning

AJM Mackus, AA Bol, WMM Kessels - Nanoscale, 2014 - pubs.rsc.org
Atomic layer deposition (ALD) is a method that allows for the deposition of thin films with
atomic level control of the thickness and an excellent conformality on 3-dimensional …

Atomic layer deposition of nanostructured materials for energy and environmental applications

C Marichy, M Bechelany, N Pinna - Advanced materials, 2012 - Wiley Online Library
Atomic layer deposition (ALD) is a thin film technology that in the past two decades rapidly
developed from a niche technology to an established method. It proved to be a key …

Titanium dioxide thin films by atomic layer deposition: A review

JP Niemelä, G Marin, M Karppinen - Semiconductor science and …, 2017 - iopscience.iop.org
Within its rich phase diagram titanium dioxide is a truly multifunctional material with a
property palette that has been shown to span from dielectric to transparent-conducting …

Tailoring nanoporous materials by atomic layer deposition

C Detavernier, J Dendooven, SP Sree… - Chemical Society …, 2011 - pubs.rsc.org
Atomic layer deposition (ALD) is a cyclic process which relies on sequential self-terminating
reactions between gas phase precursor molecules and a solid surface. The self-limiting …

Novel synthesis of ZnO/PMMA nanocomposites for photocatalytic applications

A Di Mauro, M Cantarella, G Nicotra, G Pellegrino… - Scientific reports, 2017 - nature.com
The incorporation of nanostructured photocatalysts in polymers is a strategic way to obtain
novel water purification systems. This approach takes the advantages of:(1) the presence of …