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From the bottom-up: toward area-selective atomic layer deposition with high selectivity
AJM Mackus, MJM Merkx, WMM Kessels - Chemistry of Materials, 2018 - ACS Publications
Bottom-up nanofabrication by area-selective atomic layer deposition (ALD) is currently
gaining momentum in semiconductor processing, because of the increasing need for …
gaining momentum in semiconductor processing, because of the increasing need for …
Atomic layer deposition: an overview
SM George - Chemical reviews, 2010 - ACS Publications
Atomic Layer Deposition: An Overview | Chemical Reviews Recently Viewedclose modal ACS
ACS Publications C&EN CAS Find my institution Log In ACS Publications. Most Trusted. Most …
ACS Publications C&EN CAS Find my institution Log In ACS Publications. Most Trusted. Most …
Single-atom catalysts designed and prepared by the atomic layer deposition technique
The atomic layer deposition (ALD) technique allows the synthesis of materials at the atomic
scale to be controlled. ALD has been adapted to design and prepare single-atom catalysts …
scale to be controlled. ALD has been adapted to design and prepare single-atom catalysts …
Area-selective deposition: fundamentals, applications, and future outlook
This review provides an overview of area-selective thin film deposition (ASD) with a primary
focus on vapor-phase thin film formation via chemical vapor deposition (CVD) and atomic …
focus on vapor-phase thin film formation via chemical vapor deposition (CVD) and atomic …
Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
Atomic layer deposition (ALD) is gaining attention as a thin film deposition method, uniquely
suitable for depositing uniform and conformal films on complex three-dimensional …
suitable for depositing uniform and conformal films on complex three-dimensional …
The use of atomic layer deposition in advanced nanopatterning
Atomic layer deposition (ALD) is a method that allows for the deposition of thin films with
atomic level control of the thickness and an excellent conformality on 3-dimensional …
atomic level control of the thickness and an excellent conformality on 3-dimensional …
Atomic layer deposition of nanostructured materials for energy and environmental applications
Atomic layer deposition (ALD) is a thin film technology that in the past two decades rapidly
developed from a niche technology to an established method. It proved to be a key …
developed from a niche technology to an established method. It proved to be a key …
Titanium dioxide thin films by atomic layer deposition: A review
Within its rich phase diagram titanium dioxide is a truly multifunctional material with a
property palette that has been shown to span from dielectric to transparent-conducting …
property palette that has been shown to span from dielectric to transparent-conducting …
Tailoring nanoporous materials by atomic layer deposition
Atomic layer deposition (ALD) is a cyclic process which relies on sequential self-terminating
reactions between gas phase precursor molecules and a solid surface. The self-limiting …
reactions between gas phase precursor molecules and a solid surface. The self-limiting …
Novel synthesis of ZnO/PMMA nanocomposites for photocatalytic applications
The incorporation of nanostructured photocatalysts in polymers is a strategic way to obtain
novel water purification systems. This approach takes the advantages of:(1) the presence of …
novel water purification systems. This approach takes the advantages of:(1) the presence of …