High-speed atomic force microscopy in ultra-precision surface machining and measurement: challenges, solutions and opportunities
The atomic force microscope (AFM) possesses a unique capability for three-dimensional,
high-resolution imaging down to the atomic level. It operates without the needs of additional …
high-resolution imaging down to the atomic level. It operates without the needs of additional …
Q control of an AFM microcantilever with double-stack AlN sensors and actuators
Active Atomic Force Microscope (AFM) cantilevers with integrated actuator/sensor pairs
display larger feedthrough than conventional base excited cantilevers operating in …
display larger feedthrough than conventional base excited cantilevers operating in …
Active atomic force microscope cantilevers with integrated device layer piezoresistive sensors
Active atomic force microscope cantilevers with on-chip actuation and sensing provide
several advantages over passive cantilevers which rely on piezoacoustic base-excitation …
several advantages over passive cantilevers which rely on piezoacoustic base-excitation …
A high dynamic range closed-loop stiffness-adjustable MEMS force sensor
We present a microelectromechanical system (MEMS)-based closed-loop force sensor,
capable of measuring bidirectional forces along one axis of motion. The device comprises …
capable of measuring bidirectional forces along one axis of motion. The device comprises …
High dynamic range AFM cantilever with a collocated piezoelectric actuator-sensor pair
We present a novel approach to fundamentally eliminate electrical feedthrough (cross-talk)
signal in self-sensing piezoelectric microcantilevers, used in dynamic mode atomic force …
signal in self-sensing piezoelectric microcantilevers, used in dynamic mode atomic force …
A MEMS nanopositioner with integrated tip for scanning tunneling microscopy
Slow Z-axis dynamics of Scanning Tunneling Microscope (STM) is a key contributing factor
to the slow scan speed of this instrument. A great majority of STM systems use piezotube …
to the slow scan speed of this instrument. A great majority of STM systems use piezotube …
On-Chip Self-Sensing Piezoelectric Micro-Lens Actuator With Feedback Control
High-speed micro-lens actuators are required for fast auto-focusing in miniaturized cameras.
The speed can be enhanced by adding dam** at the resonance frequency through …
The speed can be enhanced by adding dam** at the resonance frequency through …
Tuneable Q-factor of MEMS cantilevers with integrated piezoelectric thin films
In atomic force microscopes (AFM) a resonantly excited, micro-machined cantilever with a tip
is used for sensing surface-related properties. When targeting the integration of AFMs into …
is used for sensing surface-related properties. When targeting the integration of AFMs into …
Design, fabrication and characterization of active atomic force microscope cantilever arrays
M Soleymaniha, MB Coskun… - 2021 IEEE 34th …, 2021 - ieeexplore.ieee.org
In this paper, we demonstrate an Atomic Force Microscope (AFM) cantilever array featuring
three active microcantilevers for parallel imaging in tap** mode (TM). The cantilevers are …
three active microcantilevers for parallel imaging in tap** mode (TM). The cantilevers are …
AFM microcantilever with a collocated AlN sensor-actuator pair: Enabling efficient Q-control for dynamic imaging
M Mahdavi, N Nikooienejad… - Journal of …, 2020 - ieeexplore.ieee.org
This manuscript presents a novel microcantilever with an embedded piezoelectric sensor-
actuator pair for dynamic atomic force microscopy (AFM). The transducer pair is constructed …
actuator pair for dynamic atomic force microscopy (AFM). The transducer pair is constructed …