Germanium epitaxy on silicon

H Ye, J Yu - Science and Technology of Advanced Materials, 2014 - iopscience.iop.org
With the rapid development of on-chip optical interconnects and optical computing in the
past decade, silicon-based integrated devices for monolithic and hybrid optoelectronic …

[LIVRE][B] Heteroepitaxy of semiconductors: theory, growth, and characterization

JE Ayers, T Kujofsa, P Rago, J Raphael - 2016 - taylorfrancis.com
In the past ten years, heteroepitaxy has continued to increase in importance with the
explosive growth of the electronics industry and the development of a myriad of …

Photodiodes and phototransistors based on nanomaterials-silicon heterostructures: a review

S Gholipour, R Rahighi, M Panahi, A Mirsepah… - Optical and Quantum …, 2025 - Springer
The responsivity of the photodetector (PhoD) schemes based on silicon (Si) is constrained
by its narrow bandwidth, indirect bandgap, and high surface reflectivity. Advanced …

Threading-dislocation-free nanoheteroepitaxy of Ge on Si using self-directed touch-down of Ge through a thin SiO2 layer

S Han, Q Li - US Patent 7,579,263, 2009 - Google Patents
A method of forming a virtually defect free lattice mismatched nanoheteroepitaxial layer is
disclosed. The method includes forming an interface layer on a portion of a substrate. A …

[LIVRE][B] Extended defects in germanium: Fundamental and technological aspects

C Claeys, E Simoen - 2009 - Springer
The first observations of plastically deformed germanium made immediately clear that
dislocations introduced during a high-temperature deformation create acceptor states [1–5] …

Epitaxial growth of high quality Ge films on Si (001) substrates by nanocontact epitaxy

Y Nakamura, A Murayama, M Ichikawa - Crystal growth & design, 2011 - ACS Publications
We have developed a novel epitaxial growth technique called nanocontact epitaxy that
allows high quality Ge films to be epitaxially grown on Si (001) substrates using spherical …

Lattice-mismatched semiconductor structures with reduced dislocation defect densities and related methods for device fabrication

J Li, AJ Lochtefeld - US Patent 10,522,629, 2019 - Google Patents
US10522629B2 - Lattice-mismatched semiconductor structures with reduced dislocation defect
densities and related methods for device fabrication - Google Patents US10522629B2 …

Nanocontact heteroepitaxy of thin GaSb and AlGaSb films on Si substrates usingultrahigh-density nanodot seeds

Y Nakamura, T Miwa, M Ichikawa - Nanotechnology, 2011 - iopscience.iop.org
A film of GaSb grown epitaxially on a Si substrate is a direct transition semiconductor useful
for application as a light source in Si photonics and channel material in next-generation field …

Energetics of Ge nucleation on SiO2 and implications for selective epitaxial growth

D Leonhardt, SM Han - Surface Science, 2009 - Elsevier
We have measured the time evolution of Ge nucleation density on SiO2 over a temperature
range of 673–973K and deposition rates from 5.1× 1013atoms/cm2s (5ML/min) to 6.9× …

Heteroepitaxy of Ge on Si (001) with pits and windows transferred from free-standing porous alumina mask

Y Huangfu, W Zhan, X Hong, X Fang, G Ding… - …, 2013 - iopscience.iop.org
This paper reports the use of ultrathin free-standing porous alumina membrane (PAM) in
pattern transferring for selective epitaxial growth (SEG) of Ge dots and films on Si. PAM, as a …