A tutorial on the mechanisms, dynamics, and control of atomic force microscopes

DY Abramovitch, SB Andersson… - 2007 American …, 2007 - ieeexplore.ieee.org
The Atomic Force Microscope (AFM) is one of the most versatile tools in nanotechnology.
For control engineers this instrument is particularly interesting, since its ability to image the …

Advanced oxidation scanning probe lithography

YK Ryu, R Garcia - Nanotechnology, 2017 - iopscience.iop.org
Force microscopy enables a variety of approaches to manipulate and/or modify surfaces.
Few of those methods have evolved into advanced probe-based lithographies. Oxidation …

Investigation of the size-dependent dynamic characteristics of atomic force microscope microcantilevers based on the modified couple stress theory

MH Kahrobaiyan, M Asghari, M Rahaeifard… - International Journal of …, 2010 - Elsevier
In this paper, the resonant frequency and sensitivity of atomic force microscope (AFM)
microcantilevers are studied using the modified couple stress theory. The classical …

Direct replication of micro-nanostructures in the fabrication of superhydrophobic silicone rubber surfaces by compression molding

K Maghsoudi, G Momen, R Jafari, M Farzaneh - Applied Surface Science, 2018 - Elsevier
We describe a simple method for fabricating superhydrophobic high temperature vulcanized
(HTV) silicone rubber surfaces by direct replication using a compression molding system …

The art of SPM: Scanning probe microscopy in materials science

J Loos - Advanced Materials, 2005 - Wiley Online Library
Abstract In this Progress Report, outstanding scientific applications of scanning probe
microscopy (SPM) in the field of materials science and the latest technique developments …

Nanolithography on thin layers of PMMA using atomic force microscopy

C Martín, G Rius, X Borrisé, F Pérez-Murano - Nanotechnology, 2005 - iopscience.iop.org
A new technique for producing nanometre scale patterns on thin layers (< 30 nm thick) of
PMMA on silicon is described. The method consists of inducing the local modification of the …

Nanoindentation and nanomachining characteristics of gold and platinum thin films

TH Fang, WJ Chang, CI Weng - Materials Science and Engineering: A, 2006 - Elsevier
Molecular dynamics (MD) simulation and an experimental method were carried out to study
the effects of applied load, hold time, and temperature on nanoscratching and …

Mechanism of mechanical nanolithography using self-excitation microcantilever

L An, I Ogura, K Ashida, H Yabuno - Nonlinear Dynamics, 2024 - Springer
Use of the microcantilever in an atomic force microscope (AFM) that has been enhanced
with a diamond abrasive grain has emerged as a powerful nanolithography technique …

Tribonanolithography of silicon in aqueous solution based on atomic force microscopy

JW Park, N Kawasegi, N Morita, DW Lee - Applied physics letters, 2004 - pubs.aip.org
The tribonanolithography (TNL) of silicon substrate in aqueous solution based on the use of
atomic force microscopy is demonstrated. A specially designed cantilever with a diamond …

Nanoscale materials patterning by local electrochemical lithography

H Liu, S Hoeppener… - Advanced engineering …, 2016 - Wiley Online Library
Scanning probe lithography (SPL) techniques are mainly based on electrical, mechanical,
and thermal interactions between a tip and substrates. By comparison, the electrical field …