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Recent Progress of Electromagnetic Field Characterization of Chip Surface
HF Wen, T Pei, Y Wang, Y **, D Wang, Z Li… - Advanced Devices & …, 2024 - spj.science.org
The rapid development of chip manufacturing technology has increased the demand for
precise characterization techniques. The characterization technique of the physical field on …
precise characterization techniques. The characterization technique of the physical field on …
Interferometer scanning microwave microscopy: Performance evaluation
SS Tuca, M Kasper, F Kienberger… - IEEE Transactions on …, 2017 - ieeexplore.ieee.org
A systematic and quantitative comparison of electrical detection systems in scanning
microwave microscopy is reported. Scanning microwave microscopy (SMM) is capable of …
microwave microscopy is reported. Scanning microwave microscopy (SMM) is capable of …
Measurement capability of scanning microwave microscopy: Measurement sensitivity versus accuracy
M Horibe, S Kon, I Hirano - IEEE Transactions on …, 2018 - ieeexplore.ieee.org
Here, we investigate the measurement capability of a near-field scanning microwave
microscope (SMM) using an atomic force microscope with several types of matching circuits …
microscope (SMM) using an atomic force microscope with several types of matching circuits …
Evaluation and modeling of measurement resolution of a vector network analyzer for extreme impedance measurements
F Mubarak, R Romano, M Spirito - 2015 86th ARFTG …, 2015 - ieeexplore.ieee.org
A broadband S-parameter measurement system for extreme impedance measurements is
proposed and analyzed in terms of its accuracy. Measurement speed and system resolution …
proposed and analyzed in terms of its accuracy. Measurement speed and system resolution …
Noise behavior and implementation of interferometer-based broadband VNA
FA Mubarak, R Romano, L Galatro… - IEEE Transactions …, 2018 - ieeexplore.ieee.org
This paper analyzes and accurately models the complex noise behavior of vector network
analyzers (VNAs) when measuring large-mismatch devices and subsequently shows how …
analyzers (VNAs) when measuring large-mismatch devices and subsequently shows how …
An active interferometric method for extreme impedance on-wafer device measurements
Nano-scale devices and high-power transistors present extreme impedances, which are far
removed from the 50-Ω reference impedance of conventional test equipment, resulting in a …
removed from the 50-Ω reference impedance of conventional test equipment, resulting in a …
A novel calibration method for active interferometer-based VNAs
FA Mubarak, R Romano, G Rietveld… - IEEE Microwave and …, 2020 - ieeexplore.ieee.org
The addition of RF interferometers to vector network analyzer (VNA) test benches has
allowed for realization of low-noise high-frequency measurements of extreme impedance …
allowed for realization of low-noise high-frequency measurements of extreme impedance …
Best practice guide for planar S-parameter measurements using vector network analysers
In the European project PlanarCal a major effort has been undertaken to characterise
components and devices for eventual use in high-speed and microwave applications (eg …
components and devices for eventual use in high-speed and microwave applications (eg …
An IQ-steering technique for amplitude and phase control of mm-wave signals
In this contribution we present a custom test-bench capable of delivering multi-path mm-
wave signals with amplitude and phase control to an on-wafer environment. The setup …
wave signals with amplitude and phase control to an on-wafer environment. The setup …
Meeting new RF measurement challenges: Wide intermediate-frequency millimeter-wave modulated device and subsystem characterization and evolving …
J Martens - IEEE Microwave Magazine, 2018 - ieeexplore.ieee.org
As instantaneous bandwidths and overall frequency ranges continue to increase in wireless
communications, measurement requirements, even at the device and subsystem level, are …
communications, measurement requirements, even at the device and subsystem level, are …