Rapid increase in heat fluxes within a small area in microelectronic, defense, energy, solar
and medical components has spurred an urgent need for two-phase microchannel heat …

Using polymer materials to fabricate microfluidic devices provides simple, cost effective, and
disposal advantages for both lab-on-a-chip (LOC) devices and micro total analysis systems …

High aspect ratio (HAR) silicon etch is reviewed, including commonly used terms, history,
main applications, different technological methods, critical challenges, and main theories of …

Acoustic metasurfaces offer unique capabilities to steer and direct acoustic fields, though
these are generally composed of complex 3D structures, complicating their fabrication and …

This paper presents a novel silicon-based and batch-processed MEMS electrostatic
transducer for harvesting and converting the energy of vibrations into electrical energy …

Although diffractive optics have played a major role in nanoscale soft X-ray imaging, high-
resolution and high-efficiency diffractive optics have largely been unavailable for hard X …

We experimentally demonstrate the high-sensitivity optical monitoring of a micromechanical
resonator and its cooling by active control. Coating a low-loss mirror upon the resonator, we …

This chapter discusses reactive ion etching (RIE) and deep RIE (DRIE) on wafers detailing
the various equipment and reactor requirements for different applications. The Bosch …

Triboelectrification is reported as a surface phenomenon and is explained by the electron
cloud overlap model explained in the Wang transition concept. Therefore, the performance …

Currently, 3D integration is considered to be the most promising development direction
forchip industry. It relies on the through-silicon via (TSV) structure to achieve mechanical …