Growth and self-organization of SiGe nanostructures

JN Aqua, I Berbezier, L Favre, T Frisch, A Ronda - Physics Reports, 2013 - Elsevier
Many recent advances in microelectronics would not have been possible without the
development of strain induced nanodevices and bandgap engineering, in particular …

Kinetic Monte Carlo simulation for semiconductor processing: A review

I Martin-Bragado, R Borges, JP Balbuena… - Progress in Materials …, 2018 - Elsevier
Abstract The Kinetic Monte Carlo (KMC) algorithm is a particularly apt technique to simulate
the complex processing of semiconductor devices. In this review, some of the main …

Characterization of impurity do** and stress in Si/Ge and Ge/Si core–shell nanowires

N Fukata, M Mitome, T Sekiguchi, Y Bando… - ACS …, 2012 - ACS Publications
Core–shell nanowires (NWs) composed of silicon (Si) and germanium (Ge) are key
structures for realizing high mobility transistor channels, since the site-selective do** and …

[KNJIGA][B] Silicon, germanium, and their alloys: growth, defects, impurities, and nanocrystals

G Kissinger, S Pizzini - 2014 - books.google.com
Despite the vast knowledge accumulated on silicon, germanium, and their alloys, these
materials still demand research, eminently in view of the improvement of knowledge on …

The diffusion mechanism of Ge during oxidation of Si/SiGe nanofins

CS Thornton, B Tuttle, E Turner, ME Law… - … Applied Materials & …, 2022 - ACS Publications
A recently discovered, enhanced Ge diffusion mechanism along the oxidizing interface of
Si/SiGe nanostructures has enabled the formation of single-crystal Si nanowires and …

Multiscale modeling of do** processes in advanced semiconductor devices

N Zographos, C Zechner, I Martin-Bragado… - Materials Science in …, 2017 - Elsevier
The development of advanced semiconductor devices relies heavily on technology
computer-aided design. Front-end process simulators model the fabrication of devices …

Emulation and simulation of microelectronic fabrication processes

X Klemenschits - 2022 - repositum.tuwien.at
The fabrication of increasingly powerful microelectronic processors, enabled by transistor
scaling, has been a main driver of technological progress in most fields since the 1950 s …

Interrupted self-organization of SiGe pyramids

JN Aqua, A Gouyé, A Ronda, T Frisch, I Berbezier - Physical review letters, 2013 - APS
We investigate the morphological evolution of SiGe quantum dots deposited on Si (100)
during long-time annealing. At low strain, the dots' self-organization begins by an instability …