Cost of ownership model for inspection of multiple quality attributes

SY Sohn, HU Moon - IEEE transactions on semiconductor …, 2003 - ieeexplore.ieee.org
Procurement decisions for inspection equipment are often made heavily based on the initial
purchase price instead of the effects of inspection cost, equipment calibration, and utilization …

Method and system for controlling the quality of a reticle

A Bartov - US Patent 7,243,331, 2007 - Google Patents
(57) ABSTRACT A method and system are presented for use in controlling the quality of a
reticle. The method includes processing and analyzing reference data and test data, and …