Over the past four decades, the field of silicon piezoresistive pressure sensors has
undergone a major revolution in terms of design methodology and fabrication processes …

Two of the biggest challenges in medicine today are the need to detect diseases in a
noninvasive manner and to differentiate between patients using a single diagnostic tool. The …

Optomechanical sensing based on the coupling between mechanical motions and optical
resonances has attracted huge interest in sensor applications due to its small footprint, high …

This paper presents the design methodology and fabrication process of a novel
piezoresistive pressure sensor with a combined cross-beam membrane and peninsula …

The miniaturization of microelectromechanical systems (MEMS) physical sensors is driven
by global connectivity needs and is closely linked to emerging digital technologies and the …