This paper proposes a MEMS resonant pressure sensor through implementing an out-of-
plane repulsive (levitation) force to enhance the sensor detection threshold and …

In this paper, a data-driven modeling method for electromagnetically actuated micromirror in
random noisy environment is proposed. In this method, the electromagnetic micromirror is …

In this work, we investigate and quantify intrinsic noise sources in electrostatic MEMS and
study their impact on the mass sensitivity of bifurcation-based inertial sensors. Experiments …

This paper investigates the voltage–amplitude response of superharmonic resonance of
second order (order two) of alternating current (AC) electrostatically actuated …

This paper investigates the responses of initially curved micro-beams subjected to an
electrostatic excitation. A Euler–Bernoulli beam theory is utilized to derive the governing …

This work investigates the primary and secondary resonances of an electrostatically excited
double-clamped microbeam and its feasibility to be used for sensing applications. The …

This paper deals with the frequency–amplitude response of superharmonic resonance of
second order (order two) of electrostatically actuated Micro-Electro-Mechanical System …

In this brief, a precise angular tracking control strategy using nonlinear predictive
optimization control (POC) approach is address. In order to deal with the model uncertainty …

We present an experimental technique to construct the response of nonlinear resonators
under harmonic excitation as a control parameter is swept. Our technique can resolve …

We present electrostatic Micro-Electromechanical System actuators equipped with dimples
and contact pads. The introduction of dimples and contact pads is shown to prevent stiction …