Electrical isolation of the billion or so active components in each integrated device is
achieved using shallow trench isolation (STI) which requires chemical mechanical …

Cerium oxide nanoparticles (nanoceria) have gained considerable attention in biological
research due to their anti-oxidant like behaviour and regenerative nature. The current …

A series of Ce 1-x M x O 2 abrasives with different types and amounts of do** were
prepared by molten salt method. The properties of abrasives were characterized in detail by …

Ceria is widely used in industrial fields due to its unique chemical properties. In this work, a
series of CeO 2 particles with controllable morphology, size, and defect concentration were …

Molecular dynamics simulation is employed to analyze the effect of sliding, rolling and
oscillating movements on nanotribology properties of a diamond abrasive on a silicon …

In this paper, molecular dynamics simulation is applied to inspect the effect of sliding, rolling,
vibrating and rolling plus vibrating movements of a diamond abrasive on nanotribology …

In this paper, a detailed analysis is presented to characterize the performance of colloidal
silica abrasives based slurry with different abrasive sizes on CMP of hexagonal 4H-SiC …

The fixed agglomerated diamond abrasive pad had been used to planarize ultra-hard and
brittle materials such as sapphire and SiC. However, the processing stability and surface …

Comparative experiments involving processing SiC substrates with the semi-fixed and the
fixed diamond abrasive polishing tool have been conducted in this study. The material …

In this work, three different tips are considered to study the influences on the friction and
wear behaviors of monocrystalline silicon covered with an amorphous SiO 2 film using …