Aluminum nitride (AlN), distinguished by exceptional mechanical, optical, and electronic
properties, has found extensive applications in diverse domains, including heat dissipation …

Integrating microelectromechanical systems (MEMS) actuators with low-loss suspended
silicon nitride waveguides enables the precise alignment of these waveguides to other …

Laterally excited bulk acoustic resonators (XBARs) with adjustable piezoelectric coupling
coefficient () are a hot spot in radio frequency (RF) filters for the flexible adjustment of …

Imaging the complex dynamics of micro-vibrations plays a fundamental role in the
investigation of microelectromechanical systems (MEMS). However, it remains a challenge …

The film bulk acoustic wave resonator (FBAR) is one of the most popular devices in the radio
frequency field. Numerous researchers are simultaneously working to develop an effective …

Bulk acoustic wave (BAW) filters have been proven to be of high demand in today's low
power RF front-ends for mobile communication devices. Within the launch of 5G applications …

To suppress the parasitic resonance of a film bulk acoustic resonator (FBAR) and meet the
high-frequency requirements of 5G communication, an FBAR model was established based …

Expanding upon Lakin's theory by considering the phase shift of the acoustic waves in the
metallic layers, we have developed an impedance formula for a piezoelectric layer covered …

The integration of active chips such as lasers and semiconductor optical amplifiers into
silicon photonics is essential in photonic integrated circuits. Silicon as the main platform in …