Defect engineering in SiC technology for high-voltage power devices

T Kimoto, H Watanabe - Applied Physics Express, 2020‏ - iopscience.iop.org
Major features of silicon carbide (SiC) power devices include high blocking voltage, low on-
state loss, and fast switching, compared with those of the Si counterparts. Through recent …

Dislocations in 4H silicon carbide

J Li, G Yang, X Liu, H Luo, L Xu, Y Zhang… - Journal of Physics D …, 2022‏ - iopscience.iop.org
Owing to the superior properties of the wide bandgap, high carrier mobility, high thermal
conductivity and high stability, 4H silicon carbide (4H-SiC) holds great promise for …

Current status and perspectives of ultrahigh-voltage SiC power devices

T Kimoto, Y Yonezawa - Materials Science in Semiconductor Processing, 2018‏ - Elsevier
Recent progress in the SiC material and ultrahigh-voltage devices is reviewed. Regarding
the material issues, fast epitaxial growth of high-purity epitaxial layers and reduction of basal …

Growth of Shockley type stacking faults upon forward degradation in 4H-SiC pin diodes

A Tanaka, H Matsuhata, N Kawabata, D Mori… - Journal of Applied …, 2016‏ - pubs.aip.org
The growth of Shockley type stacking faults in pin diodes fabricated on the C-face of 4H-SiC
during forward current operation was investigated using Berg-Barrett X-ray topography and …

Nucleation of threading dislocations in 4H-SiC at early physical-vapor-transport growth stage

Q Shao, W Geng, S Xu, P Chen, X Zhang… - Crystal Growth & …, 2023‏ - ACS Publications
In this work, we identify the nucleation mechanism of threading dislocations (TDs)
associated with stacking faults (SFs) and 15R-SiC at the early growth stage of 4H-SiC single …

[HTML][HTML] Stacking fault expansion from basal plane dislocations converted into threading edge dislocations in 4H-SiC epilayers under high current stress

K Konishi, S Yamamoto, S Nakata… - Journal of Applied …, 2013‏ - pubs.aip.org
We evaluate the stacking faults (SFs) expansion from basal plane dislocations (BPDs)
converted into threading edge dislocations (TEDs) under the current stress to the pn devices …

Synchrotron X-ray topographic image contrast variation of screw-type basal plane dislocations located at different depths below the crystal surface in 4H-SiC

F Fujie, H Peng, T Ailihumaer, B Raghothamachar… - Acta Materialia, 2021‏ - Elsevier
The contrast features of synchrotron X-ray topographic images of screw-type basal plane
dislocations (BPDs) in on-axis 4H-SiC wafers have been studied. Screw BPD images are …

Conversion of basal plane dislocations to threading edge dislocations in 4H-SiC epilayers by high temperature annealing

X Zhang, H Tsuchida - Journal of applied physics, 2012‏ - pubs.aip.org
Conversion of basal plane dislocations (BPDs) to threading edge dislocations (TEDs) is
found in 4H-SiC epilayers after being annealed simply at high temperatures. Grazing …

In-situ and ex-situ characterizations of PVT-grown 4H-SiC single crystals

Q Shao, R Shen, H Tian, X Pi, D Yang… - Journal of Physics D …, 2024‏ - iopscience.iop.org
Abstract 4H silicon carbide (4H-SiC) is one of the most promising candidates in high-power
and high-frequency devices, owing to its excellent properties such as wide bandgap, high …

Direct confirmation of structural differences in single Shockley stacking faults expanding from different origins in 4H-SiC PiN diodes

J Nishio, A Okada, C Ota, R Iijima - Journal of Applied Physics, 2020‏ - pubs.aip.org
Structural differences are investigated in partial dislocations that have considerably different
threshold current densities for single Shockley-type stacking fault (1SSF) expansions in PiN …