Recent advances in non-contact force sensors used for micro/nano manipulation

H Zang, X Zhang, B Zhu, S Fatikow - Sensors and Actuators A: Physical, 2019 - Elsevier
Micro/nano manipulation for both mechanical and biological structures is currently a popular
research field. To protect small-scale structures and acquire their mechanical properties, a …

Microgripper design and evaluation for automated µ-wire assembly: A survey

H Llewellyn-Evans, CA Griffiths, A Fahmy - Microsystem Technologies, 2020 - Springer
Microgrippers are commonly used for micromanipulation of micro-objects from 1 to 100 µm
and attain features of reliable accuracy, low cost, wide jaw aperture and variable applied …

MEMS-based platforms for mechanical manipulation and characterization of cells

P Pan, W Wang, C Ru, Y Sun, X Liu - Journal of Micromechanics …, 2017 - iopscience.iop.org
Mechanical manipulation and characterization of single cells are important experimental
techniques in biological and medical research. Because of the microscale sizes and highly …

Review of recent progress on in situ TEM shear deformation: a retrospective and perspective view

S Li, CA Powell, S Mathaudhu, B Gwalani… - Journal of Materials …, 2022 - Springer
Advances in the use of in situ transmission electron microscopy (TEM) to study mechanical
deformation have enabled a direct correlation of mechanical properties with microstructures …

An adjustable-stiffness MEMS force sensor: Design, characterization, and control

M Maroufi, H Alemansour, MB Coskun… - Mechatronics, 2018 - Elsevier
This paper presents a novel one-degree-of-freedom microelectromechanical systems
(MEMS) force sensor. The high-bandwidth device contains on-chip sensing and actuation …

Dynamic modeling of a MEMS electro-thermal actuator considering micro-scale heat transfer with end effectors

H Zhu, Y Cao, W Ma, X Kong, S Lei… - Journal of …, 2024 - ieeexplore.ieee.org
Dynamic modeling is the basis for predicting the behavior of the electro-thermal actuator
(ETA). Although the sequential decoupling method, often used in previous studies, has been …

Automated manipulation of zebrafish embryos using an electrothermal microgripper

Z Zhang, Y Yu, P Song, Y Zhang, D Tian… - Microsystem …, 2020 - Springer
We present the first report on automated micro-manipulation of zebrafish embryos using an
electrothermally-actuated microgripper. A five-bar linkage compliant microgripper, driven by …

Coupled finite element-finite volume multi-physics analysis of MEMS electrothermal actuators

T Sciberras, M Demicoli, I Grech, B Mallia, P Mollicone… - Micromachines, 2021 - mdpi.com
Microelectromechanical systems (MEMS) are the instruments of choice for high-precision
manipulation and sensing processes at the microscale. They are, therefore, a subject of …

MEMS-based platforms for multi-physical characterization of nanomaterials: A review

J Qu, X Liu - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
Functional nanomaterials possess exceptional mechanical, electrical and thermal properties
which have significantly benefited their diverse applications to a variety of scientific and …