The review discusses the possibilities of different driving mechanisms and sensors of
spherical robots, and a special kind of mobile robots is introduced and discussed. The …

The world needs efficient, cleaner and reliable technology that is compact, economic and
durable. Several attempts have been made in the past to cross these hurdles and design a …

This paper presents design optimization, numerical modelling, fabrication and
characterization of a single-axis comb drive MEMS gap-changeable differential capacitive …

Traditional acceleration sensors use cables to transport data and batteries to supply power,
which may increase failure risk, deployment inconvenience, and maintenance difficulty. This …

As a common type of microelectromechanical systems (MEMS) inertial sensors, comb-
structured air-gap acceleration sensors have been applied to various industrial devices and …

This work proposes a miniaturized piezoelectric MEMS accelerometer based on polygonal
topology with an area of only 868× 833 μm2. The device consists of six trapezoidal …

The paper introduces a SU-8 dielectric µ-bridge based polymer microelectromechanical
systems (MEMS) Pirani gauge which can be employed for hermetic characterization of …

We report on the lateral pull-in in capacitive MEMS transducers that employ a repulsive
electrostatic force. The moving element in this system undergoes motion in two dimensions …

In this paper, we present the design and development of a Radio Frequency Micro-Electro-
Mechanical-Systems (RF-MEMS) capacitive shunt switch based on a fixed-fixed beam …

In response to the poor adaptability of several water depth pressure sensors to the marine
environment, a seawater depth pressure sensor using a titanium alloy thin film as a sensing …