Sculpting silicon at the micro and nano scales has been game‐changing to mold bulk silicon
properties and expand, in turn, applications of silicon beyond electronics, namely, in …

Proton beam (p-beam) writing is a new direct-writing process that uses a focused beam of
MeV protons to pattern resist material at nanodimensions. The process, although similar in …

By means of electrochemical treatment, crystalline silicon can be permeated with tiny,
nanostructured pores that entirely change the characteristics and properties of the material …

This review presents a comprehensive synopsis of the recent developments and
achievements in the research of nanosensors composed of plasmonic nanoparticles (NPs) …

The increasing complexity of problems in semiconductor electronics and optoelectronics has
exposed the insufficient potential of the technological do** processes currently used. One …

A new direct write 3D nano lithographic technique has been developed at the Centre for Ion
Beam Applications (CIBA) in the Physics Department of the National University of …

A method for additive layer‐by‐layer fabrication of arbitrarily shaped 3D silicon micro‐and
nanostructures is reported. The fabrication is based on alternating steps of chemical vapor …

The hole current density flowing through and around proton-irradiated areas of p-type silicon
during electrochemical anodization is simulated and studied experimentally using scanning …

We report a simple technique to form various kinds of three-dimensional structures in silicon.
The process flow is only composed of two steps: lithography and electrochemical etching …

Metal electrode structures for biosensors with a high spatial density and nm gaps have been
produced using focused megaelectronvolt (MeV) proton beam writing of poly-(methyl …