Strategies for inorganic incorporation using neat block copolymer thin films for etch mask function and nanotechnological application

C Cummins, T Ghoshal, JD Holmes… - Advanced …, 2016‏ - Wiley Online Library
Block copolymers (BCPs) and their directed self‐assembly (DSA) has emerged as a
realizable complementary tool to aid optical patterning of device elements for future …

From atoms to lives: the evolution of nanoparticle assemblies

Z Xue, C Yan, T Wang - Advanced Functional Materials, 2019‏ - Wiley Online Library
Nanoparticle (NP) assemblies have been studied over the past several decades, and the
field is advancing more quickly and reaching into more diverse fields. Reports issued from …

Autonomous discovery of emergent morphologies in directed self-assembly of block copolymer blends

GS Doerk, A Stein, S Bae, MM Noack, M Fukuto… - Science …, 2023‏ - science.org
The directed self-assembly (DSA) of block copolymers (BCPs) is a powerful approach to
fabricate complex nanostructure arrays, but finding morphologies that emerge with changes …

The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective

RZ Waldman, DJ Mandia, A Yanguas-Gil… - The Journal of …, 2019‏ - pubs.aip.org
Sequential infiltration synthesis (SIS) is an emerging materials growth method by which
inorganic metal oxides are nucleated and grown within the free volume of polymers in …

The Limits of Lamellae-Forming PS-b-PMMA Block Copolymers for Lithography

L Wan, R Ruiz, H Gao, KC Patel, TR Albrecht, J Yin… - ACS …, 2015‏ - ACS Publications
We explore the lithographic limits of lamellae-forming PS-b-PMMA block copolymers by
performing directed self-assembly and pattern transfer on a range of PS-b-PMMA materials …

Determining the shape and periodicity of nanostructures using small-angle x-ray scattering

DF Sunday, S List, JS Chawla, RJ Kline - Applied Crystallography, 2015‏ - journals.iucr.org
The semiconductor industry is exploring new metrology techniques capable of meeting the
future requirement to characterize three-dimensional structure where the critical dimensions …

[ספר][B] Metrology and Diagnostic Techniques for Nanoelectronics

Z Ma, DG Seiler - 2017‏ - taylorfrancis.com
Nanoelectronics is changing the way the world communicates, and is transforming our daily
lives. Continuing Moore's law and miniaturization of low-power semiconductor chips with …

Using block copolymers as infiltration sites for development of future nanoelectronic devices: Achievements, barriers, and opportunities

C Cummins, MA Morris - Microelectronic Engineering, 2018‏ - Elsevier
Creating inorganic nanostructures for development of nanoelectronic device components is
a highly active research area. The ability for manipulation of the chemistry of materials, as …

Quantitative three-dimensional characterization of block copolymer directed self-assembly on combined chemical and topographical prepatterned templates

T Segal-Peretz, J Ren, S **ong, G Khaira, A Bowen… - ACS …, 2017‏ - ACS Publications
Characterization of the three-dimensional (3D) structure in directed self-assembly (DSA) of
block copolymers is crucial for understanding the complex relationships between the …

Confinement and Processing Can Alter the Morphology and Periodicity of Bottlebrush Block Copolymers in Thin Films

DF Sunday, M Dolejsi, AB Chang, LJ Richter, R Li… - ACS …, 2020‏ - ACS Publications
Bottlebrush block copolymers (BBCPs) are intriguing architectural variations on linear BCPs
with highly tunable structure. Confinement can have a significant impact on polymer …