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Is poly (Methyl Methacrylate)(PMMA) a suitable substrate for ALD?: A review
Poly (methyl methacrylate)(PMMA) is a thermoplastic synthetic polymer, which displays
superior characteristics such as transparency, good tensile strength, and processability. Its …
superior characteristics such as transparency, good tensile strength, and processability. Its …
Recent advances in hollow cathode technology for plasma-enhanced ald—plasma surface modifications for aluminum and stainless-steel cathodes
KSA Butcher, V Georgiev, D Georgieva - Coatings, 2021 - mdpi.com
Recent designs have allowed hollow cathode gas plasma sources to be adopted for use in
plasma-enhanced atomic layer deposition with the benefit of lower oxygen contamination for …
plasma-enhanced atomic layer deposition with the benefit of lower oxygen contamination for …
Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
We find that a five-phase (substrate, mixed native oxide and roughness interface layer, metal
oxide thin film layer, surface ligand layer, ambient) model with two-dynamic (metal oxide thin …
oxide thin film layer, surface ligand layer, ambient) model with two-dynamic (metal oxide thin …
Spectroscopic study on alternative plasmonic TiN-NRs film prepared by R-HiPIMS with GLAD technique
C Promjantuk, T Lertvanithphol, N Limsuwan… - Radiation Physics and …, 2023 - Elsevier
In this study, we investigate the structural and optical property of alternative plasmonic
titanium nitride nanorods (TiN-NRs) films. The TiN-NRs films were deposited by reactive …
titanium nitride nanorods (TiN-NRs) films. The TiN-NRs films were deposited by reactive …
Amidoxime-Containing Ti Precursors for Atomic Layer Deposition of TiN Thin Films with Suppressed Columnar Microstructure
GY Lee, S Yeo, CM Cho, SH Oh, H Park… - Inorganic …, 2023 - ACS Publications
This paper reports the synthesis of three novel titanium complexes containing amidoxime
ligands as potential precursors for titanium nitride (TiN) thin films fabricated using atomic …
ligands as potential precursors for titanium nitride (TiN) thin films fabricated using atomic …
Measurement of Young's modulus and residual stress of atomic layer deposited Al2O3 and Pt thin films
The accurate measurement of mechanical properties of thin films is required for the design
of reliable nano/micro-electromechanical devices but is increasingly challenging for …
of reliable nano/micro-electromechanical devices but is increasingly challenging for …
High-quality SiN x thin-film growth at 300° C using atomic layer deposition with hollow-cathode plasma
We report high-quality atomic-layer-deposited SiNx thin films using a novel remote plasma
source, hollow cathode plasma (HCP), at a low temperature of 300° C. SiNx films using the …
source, hollow cathode plasma (HCP), at a low temperature of 300° C. SiNx films using the …
Encapsulation of Agrochemicals on Polymeric Microcapsules Coated with Photocatalytic Nanomaterials
MAF Forte - 2022 - search.proquest.com
Excessive use of agricultural land using agrochemicals (AC) for human livelihood results in
excessive pollution of soils and food chains. The nutritional deregulation of soils causes …
excessive pollution of soils and food chains. The nutritional deregulation of soils causes …
Methods to enhance the stability and sensitivity of NEMS biosensors
W Zheng - 2016 - era.library.ualberta.ca
Mass sensitive mechanical resonator based biosensors are a promising label free biological
sensing platform due to the capability for high sensitivity, fast response, accurate and real …
sensing platform due to the capability for high sensitivity, fast response, accurate and real …
Optoplasmonic Properties of Heterostructure Metamaterials Fabricated Using Glancing Angle and Atomic Layer Deposition Techniques & Analyzed Using Finite …
U Kilic - 2021 - search.proquest.com
Advancements in nanotechnology enable precise manipulation of materials on the atomic or
molecular scale, creating unique material and physical properties compared to their bulk …
molecular scale, creating unique material and physical properties compared to their bulk …