Nanomechanical biosensing relies on changes in the movement and deformation of micro-
and nanoscale objects when they interact with biomolecules and other biological targets …

3-D sequential integration stands out from other 3-D schemes as it enables the full use of the
third dimension. Indeed, in this approach, 3-D contact density matches with the transistor …

Microgas chromatography (GC) is promising for portable chemical analysis. We demonstrate
a nano-optomechanical system (NOMS) as an ultrasensitive mass detector in gas …

Significant advances have been made in the realization of porous SiOCH by chemical vapor
deposition processes. In this paper, the different approaches developed to introduce …

A microfluidic system combined with substrate-integrated hollow waveguide (iHWG) vapor
phase infrared spectroscopy has been developed for evaluating the chemical activity of …

Nanoelectromechanical resonators have been successfully used for a variety of sensing
applications. Their extreme resolution comes from their small size, which strongly limits their …

This book will present the theoretical and technological elements of nanosystems. Among
the different topics discussed, the authors include the electromechanical properties of …

We report here the first realization of top-down silicon nanowires (SiNW) transduced by both
junction-less field-effect transistor (FET) and the piezoresistive (PZR) effect. The suspended …

In this work, a comprehensive, predictive and quantitative model of a whole gas analyzer is
provided in order to facilitate the design of such high performance devices. All the pre …

This paper reports on ultra-scaled single-crystal Si NEMS resonators (25-40 nm thick)
operating in the 10-100 MHz frequency range. Their first monolithic integration at the front …