Solid-state quantum acoustodynamic (QAD) systems provide a compact platform for
quantum information storage and processing by coupling acoustic phonon sources with …

This letter presents the first demonstration of epitaxial scandium aluminum nitride (ScAlN)
based high-overtone bulk acoustic resonators (epi-HBARs) with over 1600 acoustic cavity …

This letter presents the first demonstration of thin-film ferroelectric Aluminum Scandium
Nitride (AlScN)-on-silicon composite resonators, targeting high-overtone resonance modes …

Bulk acoustic resonators can be fabricated on the same substrate as other components and
can operate at various frequencies with high quality factors. Mechanical dynamic metrology …

We present analytic and experimental evidence highlighting the importance of acoustic
impedance matching for efficient power transfer in RF-MEMS composite resonators such as …

This letter presents a novel type of epitaxial gallium nitride (GaN) on semi-insulating silicon
carbide (4H-SiC)-based high-overtone bulk acoustic resonators (HBARs) that eliminates the …

Global mobile data consumption continues to grow at a rapid pace. Overcrowding of the sub
6 GHz RF space and the natural bandwidth advantage to scaling up frequency, make going …

This work reports on the fabrication and characterization of an Au/ZnO/Pt-based high-
overtone bulk acoustic resonator (HBAR) on SiC substrates. We evaluate its microwave …

This paper introduces a novel oscillator that combines the tunability of spin Hall-driven nano
oscillators with the high quality factor (Q) of high overtone bulk acoustic wave resonators …

We report the first wafer-scale fabrication of semi-insulating, single-crystalline 4H-SiC
membrane resonators by timed deep reactive ion etch (DRIE). Trenches were etched 184 …