Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances
Micro and nanoelectromechanical systems M/NEMS have been extensively investigated
and exploited in the past few decades for various applications and for probing fundamental …
and exploited in the past few decades for various applications and for probing fundamental …
A comprehensive categorization of micro/nanomechanical resonators and their practical applications from an engineering perspective: a review
N Ghaemi, A Nikoobin… - Advanced Electronic …, 2022 - Wiley Online Library
Micro/nanoelectromechanical systems (M/NEMS), especially micro/nanomechanical
resonators, provide an unprecedented platform for investigating a wide range of applications …
resonators, provide an unprecedented platform for investigating a wide range of applications …
A resonant gas sensor based on multimode excitation of a buckled microbeam
We report a new gas sensing technique based on the simultaneous tracking of multiple
modes of vibration of an electrothermally heated bridge resonator operated near the …
modes of vibration of an electrothermally heated bridge resonator operated near the …
A double-side electrically-actuated arch microbeam for pressure sensing applications
In this study, we consider a pressure sensor whose main component is a clamped-clamped
shallow arched microbeam. Two fixed electrodes are used to actuate the microbeam in the …
shallow arched microbeam. Two fixed electrodes are used to actuate the microbeam in the …
Highly sensitive and wide-range resonant pressure sensor based on the veering phenomenon
We report a highly sensitive wide-range resonant pressure sensor. The concept is based on
tracking multiple modes of vibration of an electrothermally heated initially curved micro …
tracking multiple modes of vibration of an electrothermally heated initially curved micro …
[HTML][HTML] Multiple internal resonances in MEMS arch resonators
Micromachined shallow arch resonant beams have attracted significant attention thanks to
their rich dynamical behavior, inherent nonlinearities, and the potential to excite various …
their rich dynamical behavior, inherent nonlinearities, and the potential to excite various …
Two-to-one internal resonance of MEMS arch resonators
We investigate experimentally and theoretically the two-to-one internal resonance between
the first two symmetric vibrational modes of a micromachined arch resonator, which is …
the first two symmetric vibrational modes of a micromachined arch resonator, which is …
A highly sensitive and wide-range resonant magnetic micro-sensor based on a buckled micro-beam
We experimentally demonstrate a miniature highly sensitive wide-range resonant magnetic
Lorentz-force micro-sensor. The concept is demonstrated based on the detection of the …
Lorentz-force micro-sensor. The concept is demonstrated based on the detection of the …
Multimode MEMS resonator for simultaneous sensing of vapor concentration and temperature
Most gas sensors suffer from the cross sensitivity to environmental temperature, which
significantly reduces the accuracy and reliability of measurements. Current solutions require …
significantly reduces the accuracy and reliability of measurements. Current solutions require …
Effect of overheat and direct flow loading on the mems bistable flow sensor
We present the findings from an experimental study of a MEMS flow sensor in which an
initially curved, double-clamped bistable microbeam is the primary sensing element. Our …
initially curved, double-clamped bistable microbeam is the primary sensing element. Our …