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Continuous MOSFET performance increase with device scaling: The role of strain and channel material innovations
DA Antoniadis, I Aberg, CN Chleirigh… - IBM Journal of …, 2006 - ieeexplore.ieee.org
A simple model that links MOSFET performance, in the form of intrinsic switch delay, to
effective carrier velocity in the channel is developed and fitted to historical data. It is shown …
effective carrier velocity in the channel is developed and fitted to historical data. It is shown …
Enhanced hole transport in short-channel strained-SiGe p-MOSFETs
L Gomez, P Hashemi, JL Hoyt - IEEE transactions on electron …, 2009 - ieeexplore.ieee.org
Hole mobility and velocity are extracted from scaled strained-Si 0.45 Ge 0.55 channel p-
MOSFETs on insulator. Devices have been fabricated with sub-100-nm gate lengths …
MOSFETs on insulator. Devices have been fabricated with sub-100-nm gate lengths …
Experimental investigation on the quasi-ballistic transport: Part II—Backscattering coefficient extraction and link with the mobility
V Barral, T Poiroux, D Munteanu… - … on Electron Devices, 2009 - ieeexplore.ieee.org
Using a new extraction methodology taking into account multisubband population and
carrier degeneracy, we have experimentally determined backscattering coefficients, ballistic …
carrier degeneracy, we have experimentally determined backscattering coefficients, ballistic …
High-performance uniaxially strained SiGe-on-insulator pMOSFETs fabricated by lateral-strain-relaxation technique
T Irisawa, T Numata, T Tezuka, K Usuda… - IEEE transactions on …, 2006 - ieeexplore.ieee.org
Novel uniaxially strained SiGe-on-insulator (SGOI) pMOSFETs with Ge content of 20% have
been successfully fabricated by utilizing lateral (uniaxial) strain-relaxation process on …
been successfully fabricated by utilizing lateral (uniaxial) strain-relaxation process on …
Enhanced hole mobility in high Ge content asymmetrically strained-SiGe p-MOSFETs
L Gomez, CN Chléirigh, P Hashemi… - IEEE Electron Device …, 2010 - ieeexplore.ieee.org
The hole mobility characteristics of< 110>/(100)-oriented asymmetrically strained-SiGe p-
MOSFETs are studied. Uniaxial mechanical strain is applied to biaxial compressive strained …
MOSFETs are studied. Uniaxial mechanical strain is applied to biaxial compressive strained …
Ultrathin-body strained-Si and SiGe heterostructure-on-insulator MOSFETs
I Aberg, CN Chleirigh, JL Hoyt - IEEE transactions on electron …, 2006 - ieeexplore.ieee.org
The combination of channel mobility-enhancement techniques such as strain engineering
with nonclassical MOS device architectures, such as ultrathin-body (UTB) or double-gate …
with nonclassical MOS device architectures, such as ultrathin-body (UTB) or double-gate …
Integration of as High- Dielectric on Strained and Unstrained SOI MOSFETs With a Replacement Gate Process
ED Özben, JMJ Lopes, A Nichau… - IEEE electron device …, 2010 - ieeexplore.ieee.org
The integration of lanthanum lutetium oxide (LaLuO 3) with an value of 30 is, for the first
time, demonstrated on strained and unstrained SOI n/p-MOSFETs as a gate dielectric with a …
time, demonstrated on strained and unstrained SOI n/p-MOSFETs as a gate dielectric with a …
Strain and channel engineering for fully depleted SOI MOSFETs towards the 32 nm technology node
In this paper, we review different CMOS technologies used at CEA-LETI to improve hole and
electron velocity for the 32 nm technology node Fully Depleted Silicon-On-Insulator (FDSOI) …
electron velocity for the 32 nm technology node Fully Depleted Silicon-On-Insulator (FDSOI) …
Localized ultra-thin GeOI: An innovative approach to germanium channel MOSFETs on bulk Si substrates
E Batail, S Monfray, C Tabone… - 2008 IEEE …, 2008 - ieeexplore.ieee.org
In this paper we compare two innovative approaches to the integration of Ge-channel on
Insulator MOSFETs from conventional Bulk-Si substrates. The first one is based on the Ge …
Insulator MOSFETs from conventional Bulk-Si substrates. The first one is based on the Ge …
Fully depleted Silicon-On-Insulator with back bias and strain for low power and high performance applications
We demonstrate that planar Fully Depleted Silicon-On-Insulator (FDSOI) architectures allow
improving the electrostatic control (and in turn the dynamic performance by 22%) and the …
improving the electrostatic control (and in turn the dynamic performance by 22%) and the …