Recent advances in micro/nano-cutting: effect of tool edge and material properties

F Fang, F Xu - Nanomanufacturing and Metrology, 2018‏ - Springer
Micro-and nano-machining technology has been applied in industry to generate high-
precision parts with micro/nano-metric accuracy or feature size in the recent decades …

Atomistic studies of nanoindentation—A review of recent advances

CJ Ruestes, IA Alhafez, HM Urbassek - Crystals, 2017‏ - mdpi.com
This review covers areas where our understanding of the mechanisms underlying
nanoindentation has been increased by atomistic studies of the nanoindentation process …

Toward controllable wet etching of monocrystalline silicon: roles of mechanically driven defects

L Wu, L Cui, W He, J Guo, B Yu… - ACS Applied Materials & …, 2022‏ - ACS Publications
Wet chemical etching is essential not only for processing silicon (Si) wafers but also for
forming diverse structures, significantly promoting the development of the semiconductor …

Molecular dynamics simulation on crystal defects of single-crystal silicon during elliptical vibration cutting

C Liu, S To, X Sheng, J Xu - International Journal of Mechanical Sciences, 2023‏ - Elsevier
In recent years, elliptical vibration cutting (EVC) has become a promising technique to
fabricate high quality surface of single-crystal silicon. However, our understanding for its …

Sculpturing of single crystal silicon microstructures by elliptical vibration cutting

J Zhang, J Zhang, T Cui, Z Hao, A Al Zahrani - Journal of Manufacturing …, 2017‏ - Elsevier
Single crystal silicon is necessarily subjected to mechanical precision machining to fulfill its
applications in semiconductor and optoelectronics industries. However, brittle defects are …

Effects of recovery and side flow on surface generation in nano-cutting of single crystal silicon

F Xu, F Fang, X Zhang - Computational Materials Science, 2018‏ - Elsevier
The effects of the recovery and side flow on the surface generation, as well as the stagnation
region, phase transformation in nano-cutting of single crystal silicon are investigated by …

Recent advances in precision diamond wire sawing monocrystalline silicon

A Li, S Hu, Y Zhou, H Wang, Z Zhang, W Ming - Micromachines, 2023‏ - mdpi.com
Due to the brittleness of silicon, the use of a diamond wire to cut silicon wafers is a critical
stage in solar cell manufacturing. In order to improve the production yield of the cutting …

Indentation-induced plastic behaviour of nanotwinned Cu/high entropy alloy FeCoCrNi nanolaminate: an atomic simulation

H Feng, J Tang, H Chen, Y Tian, Q Fang, J Li, F Liu - RSC advances, 2020‏ - pubs.rsc.org
Using large-scale molecular dynamics (MD) simulations, the effects of interface and layer
number in the nanoindentation response of experimentally observed nanotwinned Cu/high …

Coupled effect of crystallographic orientation and indenter geometry on nanoindentation of single crystalline copper

Z Wang, J Zhang, H ul Hassan, J Zhang, Y Yan… - International Journal of …, 2018‏ - Elsevier
Surface pile-up topography is very significant for property extraction in nanoindentation
tests. In the present work, we perform crystal plasticity finite element simulations of Berkovich …

Molecular dynamics simulation of dry sliding between non-Gaussian copper rough surfaces

S Kumar, A Rajput, SK Paul, M Tiwari - Applied Surface Science, 2024‏ - Elsevier
Friction plays a significant role in the wear and tear of sliding metallic surfaces, particularly in
gears and bearings employed in nano and micro electro-mechanical systems …