Survey on recent designs of compliant micro-/nano-positioning stages

Z Wu, Q Xu - Actuators, 2018 - mdpi.com
Micromanipulation is a hot topic due to its enabling role in various research fields. In order to
perform a high precision operation at a small scale, compliant mechanisms have been …

Review on multi-degree-of-freedom piezoelectric motion stage

Y Liu, J Deng, Q Su - IEEE Access, 2018 - ieeexplore.ieee.org
Multi-degree-of-freedom (multi-DOF) piezoelectric motion stage is an important part of
modern manufacturing industry. In order to perform high precision outputs in a large travel …

Modeling and compensation of asymmetric hysteresis nonlinearity for piezoceramic actuators with a modified Prandtl–Ishlinskii model

GY Gu, LM Zhu, CY Su - IEEE Transactions on Industrial …, 2013 - ieeexplore.ieee.org
This paper presents a modified Prandtl-Ishlinskii (PI)(MPI) model for the asymmetric
hysteresis description and compensation of piezoelectric actuators. Considering the fact that …

Design and Development of a Compact Flexure-Based Precision Positioning System With Centimeter Range

Q Xu - IEEE Transactions on Industrial Electronics, 2013 - ieeexplore.ieee.org
This paper presents the design and development of a novel flexure parallel-kinematics
precision positioning stage with a centimeter range and compact dimension. The stage …

Inverse rate-dependent Prandtl–Ishlinskii model for feedforward compensation of hysteresis in a piezomicropositioning actuator

M Al Janaideh, P Krejčí - IEEE/ASME Transactions on …, 2012 - ieeexplore.ieee.org
Piezomicropositioning actuators, which are widely used in micropositioning applications,
exhibit strong rate-dependent hysteresis nonlinearities that affect the accuracy of these …

New flexure parallel-kinematic micropositioning system with large workspace

Q Xu - IEEE Transactions on Robotics, 2011 - ieeexplore.ieee.org
Flexure-based micropositioning systems with a large workspace are attractive for a variety of
precision engineering applications. In this paper, a new idea of multistage compound …

Identification and compensation of piezoelectric hysteresis without modeling hysteresis inverse

Q Xu - IEEE Transactions on Industrial Electronics, 2012 - ieeexplore.ieee.org
This paper presents a new approach for hysteresis identification and compensation of
piezoelectric actuators by resorting to an intelligent hysteresis model. In particular, a least …

Development and active disturbance rejection control of a compliant micro-/nanopositioning piezostage with dual mode

H Tang, Y Li - IEEE Transactions on Industrial Electronics, 2013 - ieeexplore.ieee.org
In the atomic force microscope (AFM) scanning system, the piezoscanner is significant in
realizing high-performance tasks. To cater to this demand, a novel compliant two-degrees-of …

Development of a novel flexure-based XY platform using single bending hybrid piezoelectric actuator

X Gao, Y Liu, S Zhang, J Deng… - IEEE/ASME Transactions …, 2022 - ieeexplore.ieee.org
In this article, a novel flexure-based XY platform using a bending hybrid piezoelectric
actuator was proposed, which was inspired by a classical piezoelectric stack-actuated …

A novel hollow-type XY piezoelectric positioning platform

L Yuan, L Wang, R Qi, Z Zhao, J **, C Zhao - International Journal of …, 2023 - Elsevier
To enhance space efficiency and reduce the planar dimensions of the piezoelectric platform,
propose an innovative three-stage flexible lever hollow XY piezoelectric platform powered …