Design and Implementation of a Flexible Electromagnetic Actuator for Tunable Terahertz Metamaterials

S Zhou, C Liang, Z Mei, R **e, Z Sun, J Li, W Zhang… - Micromachines, 2024 - mdpi.com
Actuators play a crucial role in microelectromechanical systems (MEMS) and hold
substantial potential for applications in various domains, including reconfigurable …