XBAR resonators with non-rectangular diaphragms

V Yantchev, P Turner, V Plesski, J Koskela… - US Patent …, 2021 - Google Patents
Acoustic resonator devices, filter devices, and methods of fabrication are disclosed. An
acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric …

Bandpass filter with frequency separation between shunt and series resonators set by dielectric layer thickness

V Plesski, S Yandrapalli, RB Hammond… - US Patent …, 2021 - Google Patents
Filter devices and methods of fabrication are disclosed. A filter device includes a
piezoelectric plate attached to a substrate, portions of the piezoelectric plate forming dia …

Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack

V Yantchev - US Patent 11,264,966, 2022 - Google Patents
Resonator devices, filter devices, and methods of fabrication are disclosed. A resonator
device includes a substrate and a single-crystal piezoelectric plate having front and back …

Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method

V Yantchev, P Turner, RB Hammond - US Patent 11,201,601, 2021 - Google Patents
Filter devices and methods are disclosed. A filter device includes a substrate having a
surface. A back surface of a single-crystal piezoelectric plate is attached to the surface of the …

Transversely excited film bulk acoustic resonator with recessed interdigital transducer fingers

V Plesski - US Patent 10,985,726, 2021 - Google Patents
Acoustic resonator devices, filters, and methods are dis closed. An acoustic resonator
includes a substrate and a piezoelectric plate having front and back surfaces, the back …

Transversely-excited film bulk acoustic resonator with etch-stop layer

P Turner - US Patent 10,911,023, 2021 - Google Patents
Acoustic resonator devices and methods are disclosed. An acoustic resonator device
includes a substrate having a surface and a single-crystal piezoelectric plate having front …

Transversely-excited film bulk acoustic resonator with partial BRAGG reflectors

V Yantchev - US Patent 11,901,873, 2024 - Google Patents
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a
substrate having a surface and a single-crystal piezoelectric plate having front and back …

Transversely-excited film bulk acoustic resonator using pre-formed cavities

P Turner - US Patent 11,171,629, 2021 - Google Patents
Acoustic resonator devices and filters are disclosed. An acoustic resonator device includes a
substrate having a surface, wherein the surface comprises an etched cavity, and a single …

Transversely-excited film bulk acoustic resonators for high power applications

B Garcia, R Hammond, P Turner, N Fenzi… - US Patent …, 2021 - Google Patents
US11114998B2 - Transversely-excited film bulk acoustic resonators for high power applications
- Google Patents US11114998B2 - Transversely-excited film bulk acoustic resonators for high …

Filter using piezoelectric film bonded to high resistivity silicon substrate with trap-rich layer

P Turner - US Patent 11,323,089, 2022 - Google Patents
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a
substrate having a trap-rich region adjacent to a surface and a single-crystal piezoelectric …