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XBAR resonators with non-rectangular diaphragms
Acoustic resonator devices, filter devices, and methods of fabrication are disclosed. An
acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric …
acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric …
Bandpass filter with frequency separation between shunt and series resonators set by dielectric layer thickness
V Plesski, S Yandrapalli, RB Hammond… - US Patent …, 2021 - Google Patents
Filter devices and methods of fabrication are disclosed. A filter device includes a
piezoelectric plate attached to a substrate, portions of the piezoelectric plate forming dia …
piezoelectric plate attached to a substrate, portions of the piezoelectric plate forming dia …
Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack
V Yantchev - US Patent 11,264,966, 2022 - Google Patents
Resonator devices, filter devices, and methods of fabrication are disclosed. A resonator
device includes a substrate and a single-crystal piezoelectric plate having front and back …
device includes a substrate and a single-crystal piezoelectric plate having front and back …
Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
Filter devices and methods are disclosed. A filter device includes a substrate having a
surface. A back surface of a single-crystal piezoelectric plate is attached to the surface of the …
surface. A back surface of a single-crystal piezoelectric plate is attached to the surface of the …
Transversely excited film bulk acoustic resonator with recessed interdigital transducer fingers
V Plesski - US Patent 10,985,726, 2021 - Google Patents
Acoustic resonator devices, filters, and methods are dis closed. An acoustic resonator
includes a substrate and a piezoelectric plate having front and back surfaces, the back …
includes a substrate and a piezoelectric plate having front and back surfaces, the back …
Transversely-excited film bulk acoustic resonator with etch-stop layer
P Turner - US Patent 10,911,023, 2021 - Google Patents
Acoustic resonator devices and methods are disclosed. An acoustic resonator device
includes a substrate having a surface and a single-crystal piezoelectric plate having front …
includes a substrate having a surface and a single-crystal piezoelectric plate having front …
Transversely-excited film bulk acoustic resonator with partial BRAGG reflectors
V Yantchev - US Patent 11,901,873, 2024 - Google Patents
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a
substrate having a surface and a single-crystal piezoelectric plate having front and back …
substrate having a surface and a single-crystal piezoelectric plate having front and back …
Transversely-excited film bulk acoustic resonator using pre-formed cavities
P Turner - US Patent 11,171,629, 2021 - Google Patents
Acoustic resonator devices and filters are disclosed. An acoustic resonator device includes a
substrate having a surface, wherein the surface comprises an etched cavity, and a single …
substrate having a surface, wherein the surface comprises an etched cavity, and a single …
Transversely-excited film bulk acoustic resonators for high power applications
US11114998B2 - Transversely-excited film bulk acoustic resonators for high power applications
- Google Patents US11114998B2 - Transversely-excited film bulk acoustic resonators for high …
- Google Patents US11114998B2 - Transversely-excited film bulk acoustic resonators for high …
Filter using piezoelectric film bonded to high resistivity silicon substrate with trap-rich layer
P Turner - US Patent 11,323,089, 2022 - Google Patents
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a
substrate having a trap-rich region adjacent to a surface and a single-crystal piezoelectric …
substrate having a trap-rich region adjacent to a surface and a single-crystal piezoelectric …