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[HTML][HTML] Status and prospects of plasma-assisted atomic layer deposition
Processing at the atomic scale is becoming increasingly critical for state-of-the-art electronic
devices for computing and data storage, but also for emerging technologies such as related …
devices for computing and data storage, but also for emerging technologies such as related …
Recent developments in molecular precursors for atomic layer deposition
AL Johnson, JD Parish - 2018 - books.rsc.org
One field of organometallic and materials chemistry that has seen great advancements over
the last 20 years is that of atomic layer deposition (ALD), and in particular the development …
the last 20 years is that of atomic layer deposition (ALD), and in particular the development …
Photocatalytic degradation of phenol in water under simulated sunlight by an ultrathin MgO coated Ag/TiO2 nanocomposite
Phenol is one of the most widespread, toxic and recalcitrant compounds in water sources.
Due to its persistent nature, conventional wastewater treatment methods are not effective to …
Due to its persistent nature, conventional wastewater treatment methods are not effective to …
Approaches to enhance UV light emission in ZnO nanomaterials
M Norek - Current Applied Physics, 2019 - Elsevier
Zinc oxide (ZnO) has been regarded as one of the most promising candidate for efficient UV
light emitted devices owing to its unique optical properties, such as direct wide band-gap …
light emitted devices owing to its unique optical properties, such as direct wide band-gap …
Regularly arranged ZnO/TiO2, HfO2, and ZrO2 core/shell hybrid nanostructures-towards selection of the optimal shell material for efficient ZnO-based UV light emitters
S Gierałtowska, W Zaleszczyk, M Putkonen… - Ceramics …, 2023 - Elsevier
Abstract Luminescent properties of ZnO/TiO 2, ZnO/HfO 2, and ZnO/ZrO 2 core/shell hybrid
nanotubes (NTs) with the shell thickness varying between 9 and 40 nm were studied. The …
nanotubes (NTs) with the shell thickness varying between 9 and 40 nm were studied. The …
Growth characteristics and film properties of plasma-enhanced and thermal atomic-layer-deposited magnesium oxide thin films prepared using bis …
The continuous device scaling of dynamic random access memories has been increasing
demands for the development of dielectric materials with high dielectric constants and low …
demands for the development of dielectric materials with high dielectric constants and low …
Influences of oxygen source and substrate temperature on the unusual growth mechanism of atomic layer deposited magnesium oxide using bis (cyclopentadienyl) …
BW Wang, J Choi, HG Kim, SD Hyun, C Yoo… - Journal of Materials …, 2021 - pubs.rsc.org
This research reports on the atomic layer deposition (ALD) mechanism of MgO thin film
using bis (cyclopentadienyl) magnesium [Mg (Cp) 2] as the Mg-precursor and O3 or H2O as …
using bis (cyclopentadienyl) magnesium [Mg (Cp) 2] as the Mg-precursor and O3 or H2O as …
Effect of substrate temperature on growth mechanism and properties of PEALD-MgO dielectric films for amorphous-IGZO TFTs
ZB Su, XY Zhang, X Lin, XL Li, CX Quan… - Surface and Coatings …, 2024 - Elsevier
Magnesium oxide (MgO) films have been prepared by plasma enhanced atomic layer
deposition with bis (cyclopentadienyl) magnesium precursor and oxygen plasma reactant at …
deposition with bis (cyclopentadienyl) magnesium precursor and oxygen plasma reactant at …
[HTML][HTML] Magnesium Sublimation for Growing Thin Films and Conformal Coatings on 1D Nanostructures
A method to conformally coat silica nanosprings with magnesium via sublimation at 450° C
has been developed. In addition, Mg thin films were grown on Si (100) using this method to …
has been developed. In addition, Mg thin films were grown on Si (100) using this method to …
Investigation of atomic layer deposition of magnesium oxide on a CoFeB layer for three-dimensional magnetic tunneling junctions
In this study, we comparatively investigated thermal-and plasma-enhanced atomic layer
deposition (Th-and PE-ALD) of MgO on a CoFeB layer. MgCp 2 (Bis (cyclopentadienyl) …
deposition (Th-and PE-ALD) of MgO on a CoFeB layer. MgCp 2 (Bis (cyclopentadienyl) …