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Review of piezoelectric micromachined ultrasonic transducers for rangefinders
J Pan, C Bai, Q Zheng, H **e - Micromachines, 2023 - mdpi.com
Piezoelectric micromachined ultrasonic transducer (pMUT) rangefinders have been rapidly
developed in the last decade. With high output pressure to enable long-range detection and …
developed in the last decade. With high output pressure to enable long-range detection and …
An improved lumped element model for circular-shape pMUTs
This paper presents an improved lumped element model for clamped, circular-shape,
piezoelectric micromachined ultrasonic transducers (pMUTs). A small signal equivalent …
piezoelectric micromachined ultrasonic transducers (pMUTs). A small signal equivalent …
Multi-frequency broadband piezoelectric micromachined ultrasonic transducer utilizing Helmholtz resonance
Z Wang, H Duan, Y Zheng - International Journal of Mechanical Sciences, 2023 - Elsevier
Piezoelectric micromachined ultrasonic transducers (PMUTs) with multi-frequency are
appealing for ultrasonic applications, which can meet the requirements of large detection …
appealing for ultrasonic applications, which can meet the requirements of large detection …
Ultrasond-induced haptic sensations via PMUTS
This work presents the sense of touch via non-contact ultrasonic waves by a dual-electrode
bimorph piezoelectric micromachined transducer (pMUT) array. The prototype device has …
bimorph piezoelectric micromachined transducer (pMUT) array. The prototype device has …
High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate
This work presents air-coupled piezoelectric micromachined ultrasonic transducers (pMUTs)
with high sound pressure level (SPL) under low-driving voltages by utilizing sputtered …
with high sound pressure level (SPL) under low-driving voltages by utilizing sputtered …
A novel coupled piezoelectric micromachined ultrasonic transducer based on piston mode
This article presents a piezoelectric micromachined ultrasonic transducer (pMUT) modified
with a piston diaphragm term as piston diaphragm pMUT (PD-pMUT). The transmission …
with a piston diaphragm term as piston diaphragm pMUT (PD-pMUT). The transmission …
An aluminum-nitride PMUT with pre-concaved membrane for large deformation and high quality-factor performance
S Wu, W Li, D Jiao, H Yang, T Wu… - 2021 21st International …, 2021 - ieeexplore.ieee.org
We proposed a new pre-concave membrane piezoelectric micro-machined ultrasonic
transducer (PMUT), which is presented with highest quality factor as 600 in air coupling …
transducer (PMUT), which is presented with highest quality factor as 600 in air coupling …
Lumped-parameter modeling of MEMS hydrophone for different diaphragm geometries
X Wang, H Yang, F Sun, Y Zhang, B Mao - Microelectronics Journal, 2025 - Elsevier
The geometry of hydrophone elements significantly influences array structure fill-factor and
overall hydrophone performance. This study introduces an enhanced theoretical model for …
overall hydrophone performance. This study introduces an enhanced theoretical model for …
Additive Manufacturing Electronics for Packaging High-Frequency Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducer Probes
Additive Manufacturing Electronics (AME) is a promising method that has the potential to
directly embed piezoelectric micromachined ultrasonic transducer (PMUT) probes into …
directly embed piezoelectric micromachined ultrasonic transducer (PMUT) probes into …
Attenuation of curved structural surfaces in PMUT measurements
This work presents the attenuation effect due to the surface curvature for the ultrasound
pulse-echo detection scheme. The magnitude of attenuation due to the curved surface is …
pulse-echo detection scheme. The magnitude of attenuation due to the curved surface is …