Review of piezoelectric micromachined ultrasonic transducers for rangefinders

J Pan, C Bai, Q Zheng, H **e - Micromachines, 2023 - mdpi.com
Piezoelectric micromachined ultrasonic transducer (pMUT) rangefinders have been rapidly
developed in the last decade. With high output pressure to enable long-range detection and …

An improved lumped element model for circular-shape pMUTs

S Pala, L Lin - IEEE Open Journal of Ultrasonics, Ferroelectrics …, 2022 - ieeexplore.ieee.org
This paper presents an improved lumped element model for clamped, circular-shape,
piezoelectric micromachined ultrasonic transducers (pMUTs). A small signal equivalent …

Multi-frequency broadband piezoelectric micromachined ultrasonic transducer utilizing Helmholtz resonance

Z Wang, H Duan, Y Zheng - International Journal of Mechanical Sciences, 2023 - Elsevier
Piezoelectric micromachined ultrasonic transducers (PMUTs) with multi-frequency are
appealing for ultrasonic applications, which can meet the requirements of large detection …

Ultrasond-induced haptic sensations via PMUTS

S Pala, Z Shao, Y Peng, L Lin - 2021 IEEE 34th International …, 2021 - ieeexplore.ieee.org
This work presents the sense of touch via non-contact ultrasonic waves by a dual-electrode
bimorph piezoelectric micromachined transducer (pMUT) array. The prototype device has …

High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate

F **a, Y Peng, W Yue, M Luo, M Teng… - Microsystems & …, 2024 - nature.com
This work presents air-coupled piezoelectric micromachined ultrasonic transducers (pMUTs)
with high sound pressure level (SPL) under low-driving voltages by utilizing sputtered …

A novel coupled piezoelectric micromachined ultrasonic transducer based on piston mode

L Wang, W Zhu, Z Wu, W Liu… - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
This article presents a piezoelectric micromachined ultrasonic transducer (pMUT) modified
with a piston diaphragm term as piston diaphragm pMUT (PD-pMUT). The transmission …

An aluminum-nitride PMUT with pre-concaved membrane for large deformation and high quality-factor performance

S Wu, W Li, D Jiao, H Yang, T Wu… - 2021 21st International …, 2021 - ieeexplore.ieee.org
We proposed a new pre-concave membrane piezoelectric micro-machined ultrasonic
transducer (PMUT), which is presented with highest quality factor as 600 in air coupling …

Lumped-parameter modeling of MEMS hydrophone for different diaphragm geometries

X Wang, H Yang, F Sun, Y Zhang, B Mao - Microelectronics Journal, 2025 - Elsevier
The geometry of hydrophone elements significantly influences array structure fill-factor and
overall hydrophone performance. This study introduces an enhanced theoretical model for …

Additive Manufacturing Electronics for Packaging High-Frequency Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducer Probes

VM Mastronardi, A Qualtieri, E Boni, P Tortoli… - Proceedings, 2024 - mdpi.com
Additive Manufacturing Electronics (AME) is a promising method that has the potential to
directly embed piezoelectric micromachined ultrasonic transducer (PMUT) probes into …

Attenuation of curved structural surfaces in PMUT measurements

S Pala, Y Peng, H Ding, J **e… - 2021 21st International …, 2021 - ieeexplore.ieee.org
This work presents the attenuation effect due to the surface curvature for the ultrasound
pulse-echo detection scheme. The magnitude of attenuation due to the curved surface is …