Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)
Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …
EUV-induced hydrogen plasma and particle release
M van de Kerkhof, AM Yakunin, V Kvon… - Radiation Effects and …, 2022 - Taylor & Francis
Extreme UV (EUV) lithography is the most advanced lithography technology for creating the
patterns for state-of-the-art Integrated Circuits (IC), with critical dimensions down to 10 nm …
patterns for state-of-the-art Integrated Circuits (IC), with critical dimensions down to 10 nm …
Sub-nanometer finishing of polycrystalline tin by inductively coupled plasma-assisted cutting
P Lyu, M Lai, Y Song, Z Xue, F Fang - Frontiers of Mechanical Engineering, 2023 - Springer
Polycrystalline tin is an ideal excitation material for extreme ultraviolet light sources.
However, the existence of grain boundary (GB) limits the surface roughness of …
However, the existence of grain boundary (GB) limits the surface roughness of …
Material-specific high-order harmonic generation in laser-produced plasmas for varying plasma dynamics
We present a new experimental setup for high-order harmonic generation in laser-produced
plasmas, allowing the generation of coherent VUV and EUV light, as well as characterisation …
plasmas, allowing the generation of coherent VUV and EUV light, as well as characterisation …
Joint measurement of electron density, temperature, and emission spectrum of Nd: YAG laser-produced tin plasma
We present the results of joint measurements of electron density ( ne), temperature ( T
e), and emission spectra of an Nd: YAG-driven tin plasma. Collective Thomson scattering …
e), and emission spectra of an Nd: YAG-driven tin plasma. Collective Thomson scattering …
[HTML][HTML] Production of 13.5 nm light with 5% conversion efficiency from 2 μm laser-driven tin microdroplet plasma
We demonstrate the efficient generation of extreme ultraviolet (EUV) light from laser-
produced plasma (LPP) driven by 2 μm wavelength laser light as an alternative for 10 μm …
produced plasma (LPP) driven by 2 μm wavelength laser light as an alternative for 10 μm …
Efficient photo-dissociation-induced production of hydrogen radicals using vacuum ultraviolet light from a laser-produced plasma
One of the critical issues in lithography using extreme ultraviolet (EUV) light is tin
contamination of the EUV collector mirrors in the tin-based LPP-EUV light source. The …
contamination of the EUV collector mirrors in the tin-based LPP-EUV light source. The …
The wide spectral range characteristics and dynamic evolution of laser-produced tin plasmas
Y Gao, M Su, S He, H Lu, X Liu, Y Wu, S Cao… - Journal of Quantitative …, 2024 - Elsevier
The energy levels and transitions of highly charged Sn ions are key data for analyzing
emission spectra, radiative opacity, and conversion efficiency of laser-produced Sn plasmas …
emission spectra, radiative opacity, and conversion efficiency of laser-produced Sn plasmas …
[HTML][HTML] Spectral and spatial resolution of an extreme ultraviolet broadband imaging spectrometer based on dispersion-matched zone plates
We present a combined 1D imaging and broadband spectroscopy tool for analyzing laser-
produced plasma sources of extreme ultraviolet light using a tapered zone plate that is …
produced plasma sources of extreme ultraviolet light using a tapered zone plate that is …
Extreme ultraviolet broadband imaging spectrometer using dispersion-matched zone plates
We present simultaneous 1D imaging and broadband spectroscopy of a laser-produced
plasma (LPP) source of extreme ultraviolet light, using a tapered zone plate that is matched …
plasma (LPP) source of extreme ultraviolet light, using a tapered zone plate that is matched …