Optical position encoders have been invented and investigated for several decades for
precision measurement. In this article, a comprehensive survey on the optical position …

Precision motion systems are the core of a wide range of manufacturing equipment and
scientific instruments, and their motion performance directly determines the quality and …

Precision positioning of an object relative to a reference point is a common task in many
activities of production engineering. Sensor technologies for single axis measurement …

The need for dimensional micro and nano metrology is evident, and as critical dimensions
are scaled down and geometrical complexity of objects is increased, the available …

This paper presents a multi-axis surface encoder that can measure six-degree-of-freedom
(six-DOF) translational displacement motions and angular motions of a planar motion stage …

Achieving large motion range (> 1 mm) along with nanometric motion quality (< 10 nm)
simultaneously has been a key challenge in nanopositioning systems. Practical limitations …

This paper presents the design methodology and dynamic modelling of a piezo-driven
flexure-based Scott–Russell mechanism for nano-manipulations. Based on finite element …

A planar piezoelectric actuator with large travel range is presented in this paper. The
actuator is composed of four uniform piezoelectric transducers, and each transducer can …

A three-axis surface encoder was developed for stage motion measurement with sub-
nanometric resolutions. The surface encoder was composed of a scale XY planar grating …

This paper describes the measurement of straightness error motions (vertical straightness
and horizontal straightness) and rotational error motions (pitch, yaw and roll) of a …