The implementation of electrostatic microactuators is one of the most popular technical
solutions in the field of micropositioning due to their versatility and variety of possible …

This work describes a novel micromechanical structure capable of producing out-of-plane
motion from in-plane forces generated by electrostatic microelectromechanical system …

As a common type of microelectromechanical systems (MEMS) inertial sensors, comb-
structured air-gap acceleration sensors have been applied to various industrial devices and …

This paper proposes a MEMS resonant pressure sensor through implementing an out-of-
plane repulsive (levitation) force to enhance the sensor detection threshold and …

In this study, a linear electrostatic MEMS actuator is introduced. The system consists of a
MEMS cantilever beam with combined parallel-plate and electrostatic levitation forces. By …

This work demonstrates an efficient approach to excite primary and parametric resonances
of a Microelectromechanical system (MEMS) based repulsive force actuator. The …

This paper investigates the nonlinear dynamic behavior of a repulsive force actuator from
the bifurcation perspective in the cases of primary and principal parametric resonances. The …

Background: Microelectromechanical systems are now one of the fastest growing
engineering fields. We introduce a static gas sensor based on PolyMUMPs parallel plate …

The integration of active chips such as lasers and semiconductor optical amplifiers into
silicon photonics is essential in photonic integrated circuits. Silicon as the main platform in …

This dissertation presents a novel electrostatic micro-tweezers designed to manipulate
particles with diameters in the range of 5-14 μm. The tweezers consist of two grip-arms …