Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …

The majority of microelectromechanical system (MEMS) devices must be combined with
integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers …

The worldwide thirst for portable consumer electronics in the 1990s had an enormous
impact on portable power. Lithium ion batteries, in which lithium ions shuttle between an …

We study the pull-in instability in microelectromechanical (MEMS) resonators and find that
characteristics of the pull-in phenomenon in the presence of AC loads differ from those …

Substantial reductions in vibrating micromechanical resonator series motional resistance R
x have been attained by mechanically coupling and exciting a parallel array of corner …

This paper reports new RF microelectromechanical systems (MEMS) switches actuated by
the combination of electromagnetic and electrostatic forces for low-voltage and low-power …

As microelectromechanical systems (MEMS) move rapidly towards commercialization, the
issue of mechanical characterization has emerged as a major consideration in device …

This study considers the dynamic response of electrostatic actuators with multiple degrees of
freedom that are driven by multiple voltage sources. The critical values of the applied …

Wideband 100 kHz–4 GHz power sensors are presented, which are based on sensing the
electrostatic force between an RF signal line and a suspended membrane. The electrostatic …

Over the past few years, microelectromechanical system (MEMS) based on-chip resonators
have shown significant potential for sensing and high frequency signal processing …