[HTML][HTML] Atomic layer deposition and other thin film deposition techniques: from principles to film properties

JA Oke, TC Jen - Journal of Materials Research and Technology, 2022 - Elsevier
Thin film is a modern technology aimed at improving the structural, electrical, magnetic,
optical, and mechanical properties of bulk materials. This technology has so far found …

New development of atomic layer deposition: processes, methods and applications

PO Oviroh, R Akbarzadeh, D Pan… - … and technology of …, 2019 - Taylor & Francis
Atomic layer deposition (ALD) is an ultra-thin film deposition technique that has found many
applications owing to its distinct abilities. They include uniform deposition of conformal films …

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

V Miikkulainen, M Leskelä, M Ritala… - Journal of Applied …, 2013 - pubs.aip.org
Atomic layer deposition (ALD) is gaining attention as a thin film deposition method, uniquely
suitable for depositing uniform and conformal films on complex three-dimensional …

Effective Hydrogenation Strategies to Boost Efficiency over 20% for Crystalline Silicon Solar Cell with Al2O3/Cu2O Passivating Contact

L Li, L Ying, Y Lin, X Li, X Zhou, G Du… - Advanced Functional …, 2022 - Wiley Online Library
Passivation interlayers such as Al2O3 are required to improve the hole selectivity of dopant‐
free passivating contact based on transition metal oxides. For the interlayer to provide low …

Infrared Characterization of Interfacial Si−O Bond Formation on Silanized Flat SiO2/Si Surfaces

R Tian, O Seitz, M Li, W Hu, YJ Chabal, J Gao - Langmuir, 2010 - ACS Publications
Chemical functionalization of silicon oxide (SiO2) surfaces with silane molecules is an
important technique for a variety of device and sensor applications. Quality control of self …

Recent progress in the chemistry of metal amidinates and guanidinates: Syntheses, catalysis and materials

FT Edelmann - Advances in organometallic chemistry, 2013 - Elsevier
This review provides a comprehensive overview of the most recent progress in chemistry
and applications of metal complexes containing heteroallylic ligands such as amidinates …

Perovskite LaxM1− xNi0. 8Fe0. 2O3 catalyst for steam reforming of toluene: Crucial role of alkaline earth metal at low steam condition

U Oemar, ML Ang, WF Hee, K Hidajat, S Kawi - Applied Catalysis B …, 2014 - Elsevier
The effect of alkaline earth metal (Mg, Ca, and Sr) substitution to LaNi 0.8 Fe 0.2 O 3
perovskite catalyst was investigated for steam reforming of toluene as a model compound of …

Atomic-scale simulation of ALD chemistry

SD Elliott - Semiconductor Science and Technology, 2012 - iopscience.iop.org
Published papers on atomic-scale simulation of the atomic layer deposition (ALD) process
are reviewed. The main topic is reaction mechanism, considering the elementary steps of …

Precursor design and reaction mechanisms for the atomic layer deposition of metal films

KB Ramos, MJ Saly, YJ Chabal - Coordination chemistry reviews, 2013 - Elsevier
Deposition of thin films with desired compositions, conformality and bonding to substrates is
a key component in nanotechnology research. The growth of metal films by atomic layer …

The surface chemistry of atomic layer depositions of solid thin films

F Zaera - The journal of physical chemistry letters, 2012 - ACS Publications
Atomic layer deposition (ALD) is one of the most promising methodologies available for the
growth of solid thin films conformally on complex topographies and with atomic-level control …