Overview and analysis of MEMS Coriolis vibratory ring gyroscope

J Jia, X Ding, Z Qin, Z Ruan, W Li, X Liu, H Li - Measurement, 2021 - Elsevier
Micro-electromechanical systems (MEMS) Coriolis vibratory ring gyroscope, which utilizes
Byran effect to detect rotation, is regarded as a two-dimensional derivative of vibrating shell …

Multi-ring disk resonator with elliptic spokes for frequency-modulated gyroscope

S Wang, J Chen, T Tsukamoto, S Tanaka - Sensors, 2023 - mdpi.com
In this paper, we report a multi-ring disk resonator with elliptic spokes for compensating the
aniso-elasticity of (100) single crystal silicon. The structural coupling between each ring …

Modelling and dynamic analysis of a MEMS ring resonator supported by circular curved shaped inner beams

AR Ranji, J Guo, S Alirezaee, MJ Ahamed - Physica Scripta, 2023 - iopscience.iop.org
Microelectromechanical systems (MEMS) based ring shaped resonators usually have a ring
supported by spoke shaped springs. In this paper, we developed a general analytical model …

[HTML][HTML] Design and demonstration of a microelectromechanical system single-ring resonator with inner ring-shaped spring supports for inertial sensors

I Khan, AR Ranji, G Nagesh, DSK Ting, MJ Ahamed - Sensors, 2023 - mdpi.com
This paper presents a novel single-ring resonator design and experimentally demonstrates
its dynamic behavior. The proposed ring resonator design is simple and has a solid anchor …

Design and development of a MEMS vibrating ring resonator with inner rose petal spring supports

I Khan, DSK Ting, MJ Ahamed - Microsystem Technologies, 2021 - Springer
This paper presents a novel MEMS based ring resonator design inspired by the rose petal
structure. The proposed design has four petal springs supporting the ring structure …

[HTML][HTML] Virtual Coriolis-Force-Based Mode-Matching Micromachine-Optimized Tuning Fork Gyroscope without a Quadrature-Nulling Loop

Y Wu, W Yuan, Y Xue, H Chang, Q Shen - Micromachines, 2023 - mdpi.com
A VCF-based mode-matching micromachine-optimized tuning fork gyroscope is proposed to
not only maximize the scale factor of the device, but also avoid use of an additional …

[HTML][HTML] Effects of structural dimension variation on the vibration of MEMS ring-based gyroscopes

Z Ma, X Chen, X **, Y **, X Zheng, Z ** - Micromachines, 2021 - mdpi.com
This study investigated the effects of structural dimension variation arising from fabrication
imperfections or active structural design on the vibration characteristics of a (100) single …

Mode-matched multi-ring disk resonator using (100) single crystal silicon

S Wang, J Chen, T Tsukamoto… - 2022 IEEE 35th …, 2022 - ieeexplore.ieee.org
This paper reports a novel mode-matched multi-ring disk resonator made on a (100) single
crystal silicon. The anisotropy of the stiffness was compensated by the combination of …

Mode-matched multi-ring disk resonator using single crystal (100) silicon

J Chen, T Tsukamoto, S Tanaka - 2021 IEEE International …, 2021 - ieeexplore.ieee.org
In this paper, we report two types of novel mode-matched disk resonators consisting of multi
rings made by single crystal (100) silicon. One of the resonators compensates the frequency …

A new design of mode-matched (100) silicon ring gyroscope with chamfered rectangle springs immune to fabrication error

S Okayama, A Banerjee, J Hirotani… - … Symposium on Inertial …, 2023 - ieeexplore.ieee.org
In this report, we proposed a new design of mode-matched (100) single crystal silicon (SCS)
ring gyroscope immune to fabrication errors. The robustness against dimensional and …