Ohmic contacts to n-type germanium with low specific contact resistivity
A low temperature nickel process has been developed that produces Ohmic contacts to n-
type germanium with specific contact resistivities down to (2.3±1.8)× 10− 7 Ω-cm 2 for …
type germanium with specific contact resistivities down to (2.3±1.8)× 10− 7 Ω-cm 2 for …
Nanoscale effect on the formation of the amorphous Ni silicide by rapid thermal annealing from crystalline and pre-amorphized silicon
C Delwail, K Dabertrand, S Joblot, F Mazen… - Acta Materialia, 2024 - Elsevier
The Ni monosilicide alloyed with Pt is widely used as contact material in advanced
microelectronics devices and a good knowledge of silicide formation kinetics is required for …
microelectronics devices and a good knowledge of silicide formation kinetics is required for …
Single-crystalline Ni2Ge/Ge/Ni2Ge nanowire heterostructure transistors
In this study, we report on the formation of a single-crystalline Ni 2 Ge/Ge/Ni 2 Ge nanowire
heterostructure and its field effect characteristics by controlled reaction between a …
heterostructure and its field effect characteristics by controlled reaction between a …
Improvement in joint reliability of SiC power devices by a diffusion barrier between Au-Ge solder and Cu/Ni (P)-metalized ceramic substrates
F Lang, H Yamaguchi, H Ohashi, H Sato - Journal of electronic materials, 2011 - Springer
The long-term joint reliability of SiC power devices bonded on a ceramic substrate metalized
with copper (Cu) and electroless nickel-phosphorus [Ni (P)] using a gold-germanium (Au …
with copper (Cu) and electroless nickel-phosphorus [Ni (P)] using a gold-germanium (Au …
Metastable phase formation during the reaction of Ni films with Si (001): The role of texture inheritance
S Gaudet, C Coia, P Desjardins, C Lavoie - Journal of applied physics, 2010 - pubs.aip.org
The thermally induced solid-state reaction between a 10-nm-thick Ni film and a Si (001)
substrate was investigated using in situ x-ray diffraction and ex situ pole figure analyses. The …
substrate was investigated using in situ x-ray diffraction and ex situ pole figure analyses. The …
Evolution of the Ni0. 9Pt0. 1/Si system under annealing via nano-crystalline textured phases
S Guillemin, P Gergaud, N Bernier, M Merlin… - Journal of Applied …, 2023 - pubs.aip.org
The reaction of a Ni 0.9 Pt 0.1 7 nm-thick thin film with the underlying Si (001) substrate as a
function of the annealing temperature was studied using in situ XRD techniques as well as …
function of the annealing temperature was studied using in situ XRD techniques as well as …
Observation and suppression of nickel germanide overgrowth on germanium substrates with patterned SiO2 structures
DP Brunco, K Opsomer, B De Jaeger… - … and Solid-State …, 2007 - iopscience.iop.org
We have investigated the reactions of thin Ni films on Ge-on-Si substrates with patterned
structures. For rapid thermal anneals (RTAs) hotter than, an undesirable growth mode is …
structures. For rapid thermal anneals (RTAs) hotter than, an undesirable growth mode is …
Progress in the understanding of Ni silicide formation for advanced MOS structures
Metallic silicides have been used as contact materials on source/drain and gate in metal‐
oxide semiconductor (MOS) structure for 40 years. Since the 65 nm technology node, NiSi is …
oxide semiconductor (MOS) structure for 40 years. Since the 65 nm technology node, NiSi is …
Thermal annealing behaviour of platinum, nickel and titanium Schottky barrier diodes on n-Ge (1 0 0)
A Chawanda, C Nyamhere, FD Auret, W Mtangi… - Journal of alloys and …, 2010 - Elsevier
Platinum (Pt) and titanium (Ti) Schottky barrier diodes were fabricated on bulk grown (100)
Sb-doped n-type germanium using the electron beam whereas nickel (Ni) contacts were …
Sb-doped n-type germanium using the electron beam whereas nickel (Ni) contacts were …
Enhanced thermal stability of nickel germanide on thin epitaxial germanium by adding an ultrathin titanium layer
S Zhu, MB Yu, GQ Lo, DL Kwong - Applied Physics Letters, 2007 - pubs.aip.org
The thermal stability of NiGe films formed on epitaxial Ge on Si substrates was improved
from 450 to 550 C by simply adding an ultrathin (∼ 1 nm) Ti layer during Ni deposition …
from 450 to 550 C by simply adding an ultrathin (∼ 1 nm) Ti layer during Ni deposition …