Performance analysis and simulation of mems capacitive pressure sensor

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Simulation and Analysis of Molybdenum Tungsten Impact on Capacitive MEMS Pressure Sensor

N Belgroune, M Zayed Ahmed, M Sayah… - Arabian Journal for …, 2025 - Springer
This paper utilizes COMSOL software to conduct comprehensive simulations and analyses
to evaluate the Micro-Electro-Mechanical System (MEMS) capacitive pressure sensor's …
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[PDF][PDF] Simulation and Analysis of Molybdenum Tungsten Impact On Capacitive MEMS Pressure Sensor

B Nadir, MZ Ahmed, S Mohamed, B Faiza, S Meriem… - researchgate.net
This paper utilizes COMSOL software to conduct comprehensive simulations and analyses
to evaluate the Micro-Electro-Mechanical System (MEMS) capacitive pressure sensor's …
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