Similarity theory and scaling laws for low-temperature plasma discharges: A comprehensive review

Y Fu, H Wang, X Wang - Reviews of Modern Plasma Physics, 2023 - Springer
Similarity theory and scaling laws determine how physical laws remain the same when
control parameters are changed, which is essential for the correlation, prediction, and …

Non-equilibrium in low-temperature plasmas

F Taccogna, G Dilecce - The European Physical Journal D, 2016 - Springer
The wide range of applications of cold plasmas originates from their special characteristic of
being a physical system out of thermodynamic equilibrium. This property enhances its …

[HTML][HTML] Electron dynamics in low pressure capacitively coupled radio frequency discharges

S Wilczek, J Schulze, RP Brinkmann, Z Donkó… - Journal of Applied …, 2020 - pubs.aip.org
In low temperature plasmas, the interaction of the electrons with the electric field is an
important current research topic that is relevant for many applications. Particularly, in the low …

Higher harmonics in multipactor induced plasma ionization breakdown near a dielectric surface

DQ Wen, P Zhang, J Krek, Y Fu, JP Verboncoeur - Physical Review Letters, 2022 - APS
In this Letter, the novel physics of higher harmonic (HH) generation of the normal electric
field near a dielectric surface is reported in multipactor induced plasma ionization …

Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation

J Schulze, Z Donko, T Lafleur, S Wilczek… - Plasma Sources …, 2018 - iopscience.iop.org
Power absorption by electrons from the space-and time-dependent electric field represents
the basic sustaining mechanism of all radio-frequency driven plasmas. This complex …

Multi-diagnostic experimental validation of 1d3v PIC/MCC simulations of low pressure capacitive RF plasmas operated in argon

DA Schulenberg, I Korolov, Z Donkó… - Plasma Sources …, 2021 - iopscience.iop.org
The particle-in-cell/Monte Carlo collisions (PIC/MCC) simulation approach has become a
standard and well-established tool in studies of capacitively coupled radio frequency (RF) …

Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches

F Krüger, S Wilczek, T Mussenbrock… - … Sources Science and …, 2019 - iopscience.iop.org
The etching of sub micrometer high-aspect-ratio (HAR) features into dielectric materials in
low pressure radio frequency technological plasmas is limited by the accumulation of …

Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code

D Eremin, B Berger, D Engel, J Kallähn… - Plasma Sources …, 2023 - iopscience.iop.org
The present work investigates electron transport and heating mechanisms using an (r, z)
particle-in-cell simulation of a typical rf-driven axisymmetric magnetron discharge with a …

Electric field filamentation and higher harmonic generation in very high frequency capacitive discharges

S Sharma, N Sirse, A Sen, JS Wu… - Journal of Physics D …, 2019 - iopscience.iop.org
The effects of the discharge voltage on the formation and nature of electric field transients in
a symmetric, collisionless, very high frequency, capacitively coupled plasma are studied …

Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode

D Eremin, D Engel, D Krüger, S Wilczek… - Plasma Sources …, 2023 - iopscience.iop.org
The electron dynamics and the mechanisms of power absorption in radio-frequency (RF)
driven, magnetically enhanced capacitively coupled plasmas at low pressure are …