Mode properties and thermoelastic dam** (TED) are crucial for the disk resonator
gyroscope (DRG). Most of the DRG structure designs do not involve the mode order …

The microelectromechanical system (MEMS) vibrating ring gyroscope (VRG) holds
significant promise for angle sensing applications, with its performance highly reliant on the …

This paper presents a high-precision method for identifying the unbalanced mass of a fused
silica hemispherical resonator and an ion-beam trimming process for removing defective …

Investigating the surface loss mechanism of hemispherical resonators is essential to further
improve the performance of hemispherical resonant gyroscopes. Although many studies …

This study reports a closed-loop system (CLS) for resonant micro-electromechanical
systems (MEMS) sensors subject to blue-sideband excitation (BSE) for the first time …

Metal coating of Fused Silica (FS) Micro-machined Hemispherical Resonator Gyroscopes
(micro-HRGs) is necessary to allow for capacitive actuation and detection of motion …

Perfectly matched layer has been used for solving anchor‐loss limited quality factor in the
Micro electromechanical systems. However, setting up a well‐behaved perfectly matched …

Bias accuracy of micromachined gyroscope is deteriorated severely when suffering from
unknown environmental disturbances (UD), such as temperature, vibration, and shock. In …

In this paper, the characterization and analysis of a silicon micromachined Quad Mass
Gyroscope (QMG) in the rate mode of operation are presented. We report on trade-offs …

In this paper, we propose a radially pleated disk resonator for gyroscopic application. The
structure is made up of concentrically nested radially pleated rings that are interconnected …