Water treatment based on atomically engineered materials: Atomic layer deposition and beyond
Global water stress and challenges for producing sufficient supplies of fit-for-purpose water
are amplifying. Atomically engineered interfaces are emerging as a powerful tool in the …
are amplifying. Atomically engineered interfaces are emerging as a powerful tool in the …
Recent advances in sequential infiltration synthesis (Sis) of block copolymers (bcps)
In the continuous downscaling of device features, the microelectronics industry is facing the
intrinsic limits of conventional lithographic techniques. The development of new synthetic …
intrinsic limits of conventional lithographic techniques. The development of new synthetic …
The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective
Sequential infiltration synthesis (SIS) is an emerging materials growth method by which
inorganic metal oxides are nucleated and grown within the free volume of polymers in …
inorganic metal oxides are nucleated and grown within the free volume of polymers in …
Atomic layer deposition on polymer thin films: on the role of precursor infiltration and reactivity
RR Petit, J Li, B Van de Voorde… - … Applied Materials & …, 2021 - ACS Publications
Inorganic barriers grown by atomic layer deposition (ALD) can overcome the stability issues
originating from the permeation of foreign species (water and oxygen) into polymer thin …
originating from the permeation of foreign species (water and oxygen) into polymer thin …
The development and atomic structure of zinc oxide crystals grown within polymers from vapor phase precursors
Sequential infiltration synthesis (SIS), also known as vapor phase infiltration (VPI), is a
quickly expanding technique that allows growth of inorganic materials within polymers from …
quickly expanding technique that allows growth of inorganic materials within polymers from …
Introducing a Robust Flexible Conductive Hybrid: Indium Oxide-ParyleneC Obtained by Vapor Phase Infiltration
Hybrid materials are a merger of inorganic and organic materials and, as such, have the
potential to outperform the characteristics and functionalities of conventional, that is …
potential to outperform the characteristics and functionalities of conventional, that is …
Sequential infiltration synthesis of electronic materials: group 13 oxides via metal alkyl precursors
The sequential infiltration synthesis (SIS) of group 13 indium and gallium oxides (In2O3 and
Ga2O3) into poly (methyl methacrylate)(PMMA) thin films is demonstrated using …
Ga2O3) into poly (methyl methacrylate)(PMMA) thin films is demonstrated using …
Vapor Infiltration Synthesis of Indium Sulfide Magic Size Cluster
The energetically favorable formation of atomically precise clusters, known as magic size
clusters, in the solution phase enables a precision nanoscale synthesis with exquisite …
clusters, in the solution phase enables a precision nanoscale synthesis with exquisite …
Understanding and Controlling Polymer–Organometallic Precursor Interactions in Sequential Infiltration Synthesis
Sequential infiltration synthesis (SIS) is an emerging method for vapor-phase growth of
inorganic materials within polymers that is utilized for hybrid organic–inorganic and …
inorganic materials within polymers that is utilized for hybrid organic–inorganic and …
Advancing next generation nanolithography with infiltration synthesis of hybrid nanocomposite resists
Organic–inorganic hybrid resists are emerging as an effective way of addressing stringent
process requirements for aggressive down-scaling of semiconducting devices. However …
process requirements for aggressive down-scaling of semiconducting devices. However …