Advances in laboratory-scale ptychography using high harmonic sources
Extreme ultraviolet microscopy and wavefront sensing are key elements for next-generation
ultrafast applications, such as chemically-resolved imaging, focal spot diagnostics in pump …
ultrafast applications, such as chemically-resolved imaging, focal spot diagnostics in pump …
Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry
Next-generation nano-and quantum devices have increasingly complex 3D structure. As the
dimensions of these devices shrink to the nanoscale, their performance is often governed by …
dimensions of these devices shrink to the nanoscale, their performance is often governed by …
Tailoring spatial entropy in extreme ultraviolet focused beams for multispectral ptychography
Diffractive optics can be used to accurately control optical wavefronts, even in situations
where refractive components such as lenses are not available. For instance, conventional …
where refractive components such as lenses are not available. For instance, conventional …
Wavelength-multiplexed multi-mode EUV reflection ptychography based on automatic differentiation
Ptychographic extreme ultraviolet (EUV) diffractive imaging has emerged as a promising
candidate for the next generationmetrology solutions in the semiconductor industry, as it can …
candidate for the next generationmetrology solutions in the semiconductor industry, as it can …
Tabletop extreme ultraviolet reflectometer for quantitative nanoscale reflectometry, scatterometry, and imaging
Imaging using coherent extreme-ultraviolet (EUV) light provides exceptional capabilities for
the characterization of the composition and geometry of nanostructures by probing with high …
the characterization of the composition and geometry of nanostructures by probing with high …
Table-top nanoscale coherent imaging with XUV light
Modern laser-based XUV light sources provide very high photon fluxes which have
previously only been available at large scale facilities. This allows high-performance XUV …
previously only been available at large scale facilities. This allows high-performance XUV …
Temporal and spectral multiplexing for EUV multibeam ptychography with a high harmonic light source
We demonstrate temporally multiplexed multibeam ptychography implemented for the first
time in the EUV, by using a high harmonic based light source. This allows for simultaneous …
time in the EUV, by using a high harmonic based light source. This allows for simultaneous …
Three-dimensional single-shot ptychography
Here we introduce three-dimensional single-shot ptychography (3DSSP). 3DSSP leverages
an additional constraint unique to the single-shot geometry to deconvolve multiple 2D …
an additional constraint unique to the single-shot geometry to deconvolve multiple 2D …
Wavelength-multiplexed single-shot ptychography
We present the first experimental demonstration of wavelength-multiplexing in single-shot
ptychography. Specifically, we experimentally reconstruct the complex transmission profile …
ptychography. Specifically, we experimentally reconstruct the complex transmission profile …
aPIE: an angle calibration algorithm for reflection ptychography
Reflection ptychography is a lensfree microscopy technique particularly promising in regions
of the electromagnetic spectrum where imaging optics are inefficient or not available. This is …
of the electromagnetic spectrum where imaging optics are inefficient or not available. This is …