This article reviews the investigation of the mode-localized microelectromechanical system
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …

An ultrasensitive micromechanical voltmeter has been demonstrated, for the first time, using
tuned-mass-damper (TMD) based mode-localized structure in a CMOS-MEMS process …

In the twenty-first century, biosensors have gathered much wider attention than ever before,
irrespective of the technology that promises to bring them forward. With the recent COVID-19 …

This article reports on laser technology based fabrication approach to develop a micro-size
capacitive gap based transducer useful for a variety of applications. A low-cost prototype has …

The interest in MEMS (Micro-electro-mechanical-system) resonant devices has been rapidly
growing over the past decades. They have become one of the major building blocks among …

A study on mass microsensors using Anderson localization is conducted in this thesis.
Different ways allowing to enhance their performances are proposed and demonstrated …

This thesis documents a first time demonstration of electromechanical transducer and/or
sensor fabricated using Direct Laser Writing (DLW). A low-cost prototype has been …