Atomic layer deposition of stable 2D materials
Following the graphene isolation, strong interest in two dimensional (2D) materials has been
driven by their outstanding properties. Their typical intrinsic structure, including strong in …
driven by their outstanding properties. Their typical intrinsic structure, including strong in …
Atomic layer deposition of two-dimensional layered materials: processes, growth mechanisms, and characteristics
Since the discovery of graphene, there has been an ever-increasing interest in two-
dimensional (2D) layered materials with exceptional properties. To this end, a variety of …
dimensional (2D) layered materials with exceptional properties. To this end, a variety of …
Recent developments in molecular precursors for atomic layer deposition
AL Johnson, JD Parish - 2018 - books.rsc.org
One field of organometallic and materials chemistry that has seen great advancements over
the last 20 years is that of atomic layer deposition (ALD), and in particular the development …
the last 20 years is that of atomic layer deposition (ALD), and in particular the development …
Tunability of near infrared opto-synaptic properties of thin MoO3 films fabricated by atomic layer deposition
H Xu, MK Akbari, S Wang, S Chen, E Kats… - Applied Surface …, 2022 - Elsevier
Thin MoO 3 films with different thickness at nanoscale were fabricated by atomic layer
deposition technique over Au electrodes on the Si/SiO 2 wafers. Bis (t-butylimido) bis …
deposition technique over Au electrodes on the Si/SiO 2 wafers. Bis (t-butylimido) bis …
[HTML][HTML] Atomic layer deposition of crystalline molybdenum oxide thin films and phase control by post-deposition annealing
M Mattinen, PJ King, L Khriachtchev, MJ Heikkilä… - Materials today …, 2018 - Elsevier
Molybdenum forms a range of oxides with different stoichiometries and crystal structures,
which lead to different properties and performance in diverse applications. Herein …
which lead to different properties and performance in diverse applications. Herein …
Nano-thickness dependence of supercapacitor performance of the ALD-fabricated two-dimensional WO3
Abstract Effect of nano-thickness of the two-dimensional (2D) WO 3 electrodes on their
supercapacitor performance was investigated at the nanometers' thickness level. The 2D …
supercapacitor performance was investigated at the nanometers' thickness level. The 2D …
Wafer-scaled monolayer WO3 windows ultra-sensitive, extremely-fast and stable UV-A photodetection
The monolayer WO 3-based UV-A photodetectors, fabricated by atomic layer deposition
(ALD) technique at the large area of SiO 2/Si wafer, have demonstrated vastly improved …
(ALD) technique at the large area of SiO 2/Si wafer, have demonstrated vastly improved …
Origin of Decomposition in a Family of Molybdenum Precursor Compounds
The bis (tert-butylimido)-molybdenum (VI) framework has been used successfully in the
design of vapor-phase precursors for molybdenum-containing thin films, so understanding …
design of vapor-phase precursors for molybdenum-containing thin films, so understanding …
Thermal Selective Vapor Etching of TiO2: Chemical Vapor Etching via WF6 and Self-Limiting Atomic Layer Etching Using WF6 and BCl3
PC Lemaire, GN Parsons - Chemistry of Materials, 2017 - ACS Publications
Controlled thin film etching is essential for further development of sub-10 nm semiconductor
devices. Vapor-phase thermal etching of oxides is appealing for achieving highly conformal …
devices. Vapor-phase thermal etching of oxides is appealing for achieving highly conformal …
Atomic layer deposition-enabled single layer of tungsten trioxide across a large area
Reduction from multi-layer to one fundamental layer thickness represents a variety of exotic
properties and distinctive applications of such two-dimensional (2D) semiconductor as …
properties and distinctive applications of such two-dimensional (2D) semiconductor as …