A comprehensive review is presented on the advances achieved in past years on
fundamental and applied materials science of diamond films and engineering to integrate …

Micro-and Nano-Electro-Mechanical Systems (MEMS and NEMS) represent existing
(MEMS) and emerging (NEMS) technologies based on microfabrication of micron to …

Micro-or nanoelectromechanical system (MEMS/NEMS) is a multidisciplinary field, which
has witnessed explosive growth during the past decades. The current materials for MEMS …

Diamond, because of its unique physical, chemical, and electrical properties and the
feasibility of growing it in thin-film form, is an ideal choice as a material for the fabrication of …

A new concept concerning dielectric engineering is presented in this study aiming at a net
improvement of the performance of dielectric layers in RF MEMS capacitive switches with …

Nanoindentation and sliding experiments using single-crystal silicon atomic force
microscope probes in contact with diamond substrates in vacuum were carried out in situ …

The effect of space radiation on the reliability of microelectromechanical systems (MEMS)
devices is an important consideration for future upper atmosphere and space applications …

This paper presents a radio frequency micro-electro-mechanical-systems (RF MEMS)
fabrication process based on a stacked structural layer and Au–Au thermocompression …

This paper presents the electrical assessment and modeling of the discharge process in RF
MEMS capacitive switches with nanocrystalline diamond dielectric film. The assessment is …

Diamond films are considered as superior dielectric in comparison to Si 3 N 4 for MEMS
applications. The present paper provides a detail characterization study of electrical …