Control and understanding of metal contacts to β-Ga2O3 single crystals: a review

H Kim - SN Applied Sciences, 2022 - Springer
Abstract Gallium oxide (Ga2O3) is a promising semiconductor for high power devices and
solar blind ultraviolet photodetectors due to its large bandgap, a high breakdown field, and …

Tutorial: Metalorganic chemical vapor deposition of β-Ga2O3 thin films, alloys, and heterostructures

AFM Bhuiyan, Z Feng, L Meng, H Zhao - Journal of Applied Physics, 2023 - pubs.aip.org
ABSTRACT β-phase gallium oxide (Ga2O3) is an emerging ultrawide bandgap (UWBG)
semiconductor with a bandgap energy of∼ 4.8 eV and a predicted high critical electric field …

[HTML][HTML] Scaled β-Ga2O3 thin channel MOSFET with 5.4 MV/cm average breakdown field and near 50 GHz fMAX

CN Saha, A Vaidya, AFM Bhuiyan, L Meng… - Applied Physics …, 2023 - pubs.aip.org
This Letter reports a high performance β-Ga 2 O 3 thin channel MOSFET with T gate and
degenerately doped (n++) source/drain contacts regrown by metal organic chemical vapor …

[HTML][HTML] Vertical β-Ga2O3 field plate Schottky barrier diode from metal-organic chemical vapor deposition

E Farzana, F Alema, WY Ho, A Mauze, T Itoh… - Applied Physics …, 2021 - pubs.aip.org
Vertical β-Ga 2 O 3 Schottky diodes from metal-organic chemical vapor deposition (MOCVD)-
grown epitaxial films are reported in this paper for high-power application devices. The …

[HTML][HTML] Ultrawide bandgap semiconductors

M Higashiwaki, R Kaplar, J Pernot, H Zhao - Applied Physics Letters, 2021 - pubs.aip.org
Ultrawide bandgap (UWBG) semiconductors, with energy bandgaps (> 4 eV), much wider
than the conventional wide bandgap (WBG) of GaN (3.4 eV) and SiC (3.2 eV), represent an …

Si do** in MOCVD grown (010) β-(AlxGa1− x) 2O3 thin films

AFM Bhuiyan, Z Feng, L Meng, A Fiedler… - Journal of Applied …, 2022 - pubs.aip.org
In this work, the structural and electrical properties of metalorganic chemical vapor
deposited Si-doped β-(Al x Ga 1− x) 2 O 3 thin films grown on (010) β-Ga 2 O 3 substrates …

[HTML][HTML] Proton radiation effects on electronic defect states in MOCVD-grown (010) β-Ga2O3

JF McGlone, H Ghadi, E Cornuelle… - Journal of Applied …, 2023 - pubs.aip.org
The impact of 1.8 MeV proton irradiation on metalorganic chemical vapor deposition grown
(010) β-Ga 2 O 3 Schottky diodes is presented. It is found that after a 10.8× 10 13 cm− 2 …

MOCVD growth of (010) β-(AlxGa1−x)2O3 thin films

AFMAU Bhuiyan, Z Feng, L Meng, H Zhao - Journal of Materials Research, 2021 - Springer
In this work, we systematically investigate the effects of growth parameters on the structural
and surface morphological properties of β-(Al x Ga1− x) 2O3 thin films grown on (010) β …

[HTML][HTML] Identification and characterization of deep nitrogen acceptors in β-Ga2O3 using defect spectroscopies

H Ghadi, JF McGlone, E Cornuelle, A Senckowski… - APL Materials, 2023 - pubs.aip.org
The ability to achieve highly resistive beta-phase gallium oxide (β-Ga 2 O 3) layers and
substrates is critical for β-Ga 2 O 3 high voltage and RF devices. To date, the most common …

Band offsets at metalorganic chemical vapor deposited β-(AlxGa1− x) 2O3/β-Ga2O3 interfaces—Crystalline orientation dependence

AFM Bhuiyan, Z Feng, HL Huang, L Meng… - Journal of Vacuum …, 2021 - pubs.aip.org
The β-(Al x Ga 1− x) 2 O 3 alloy represents an emerging ultrawide bandgap semiconductor
material for applications in high-power electronics and deep ultraviolet optoelectronics. The …